Scaling of high-k dielectrics towards sub-Inm EOT

Heyns, M (author)

Beck, S (author)

Bender, H (author)

show more...

Blomme, P (author)

Boullart, W (author)

Brijs, B (author)

Carter, R (author)

Caymax, M (author)

Clues, M (author)

Conard, T (author)

De Gendt, S (author)

Degraeve, R (author)

Delabie, A (author)

Deweerdt, W (author)

Groeseneken, G (author)

Henson, K (author)

Kauerauf, T (author)

Kubicck, S (author)

Lucci, L (author)

Lujan, G (author)

Mentens, J (author)

Pantisano, L (author)

Petry, J (author)

Richard, O (author)

Rohr, E (author)

Schram, T (author)

Vandervvorst, W (author)

van Doome, P (author)

van Eishocht, S (author)

Wetslinder, Jörgen (author)

Uppsala universitet,Institutionen för teknikvetenskaper,Elektronik,Fasta tillståndets elektronik

Witters, T (author)

Zhao, C (author)

Carter, E (author)

Chen, J (author)

Cosnier, V (author)

Green, M (author)

Jang, S E (author)

Kaushik, V (author)

Kerber, A (author)

Kluth, J (author)

Lin, S (author)

Tsai, W (author)

Young, E (author)

Manabe, Y (author)

Shimamoto, Y (author)

Bajolet, P (author)

de Witte, H (author)

Maes, J W (author)

Date, L (author)

Pique, D (author)

Coenergrachts, B (author)

Vertommen, J (author)

Passefort, S (author)

show less...

 (creator_code:org_t)

2003

2003

English.

In: Proceedings of International Symposium on VLSI Technology, Systems, and Applications. ; , s. 247-250

Related links:

https://urn.kb.se/re...

• Conference paper (peer-reviewed)