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Gas flow charactarization of a network of crossed narrow v-grooves in silicon

Bejhed, Johan (author)
Uppsala universitet,Institutionen för teknikvetenskaper
Nguyen, Hugo (author)
Eriksson, Anders (author)
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Stenmark, Lars (author)
Köhler, Johan (author)
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 (creator_code:org_t)
Undefined language.
In: Sensors and Actuators (A).
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Bejhed, Johan
Nguyen, Hugo
Eriksson, Anders
Stenmark, Lars
Köhler, Johan
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Uppsala University

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