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Deep levels in low-...
Deep levels in low-energy electron-irradiated 4H-SiC
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- Carlsson, Patrick (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- Son Tien, Nguyen (författare)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
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- Beyer, Franziska (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- Pedersen, Henrik (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- Isoya, J (författare)
- University of Tsukuba
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- Morishita, N (författare)
- Japan Atom Energy Agency
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- Ohshima, T (författare)
- Japan Atom Energy Agency
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- Janzén, Erik (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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(creator_code:org_t)
- 2009-04-07
- 2009
- Engelska.
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Ingår i: PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS. - : Wiley. - 1862-6254. ; 3:4, s. 121-123
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Deep levels introduced by low-energy (200 keV) electron irradiation in n-type 4H-SiC epitaxial layers grown by chemical vapour deposition were studied by deep level transient spectroscopy (DLTS) and photoexcitation electron paramagnetic resonance (photo-EPR). After irradiation, several DLTS levels, EH1, EH3, Z(1/2), EH5 and EH6/7, often reported in irradiated 4H-SiC, were observed. In irradiated freestanding films from the same wafer, the EPR signals of the carbon vacancy in the positive and negative charge states, V-C(+) and V-C(-), respectively, can be observed simultaneously under illumination with light of certain photon energies. Comparing the ionization energies obtained from DLTS and photo-EPR, we suggest that the EH6/7 (at similar to E-C - 1.6 eV) and EH5 (at similar to E-C - 1.0 eV) electron traps may be related to the single donor (+ vertical bar 0) and the double acceptor (1- vertical bar 2-) level of V-C, respectively. Judging from the relative intensity of the DLTS signals, the EH6/7 level may also be contributed to by other unidentified defects.
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- NATURAL SCIENCES
- NATURVETENSKAP
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