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Nanophotonics-based...
Nanophotonics-based low-temperature PECVD epitaxial crystalline silicon solar cells
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- Chen, W. H. (author)
- Université Paris-Saclay,University Paris-Saclay
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- Cariou, R. (author)
- Université Paris-Saclay,University Paris-Saclay
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- Foldyna, M. (author)
- Université Paris-Saclay,University Paris-Saclay
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- Depauw, V. (author)
- Interuniversity Micro-Electronics Center at Leuven
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- Trompoukis, C. (author)
- Interuniversity Micro-Electronics Center at Leuven
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- Drouard, E. (author)
- Institut des Nanotechnologies de Lyon
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- Lalouat, L. (author)
- Institut des Nanotechnologies de Lyon
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- Harouri, A. (author)
- Institut des Nanotechnologies de Lyon
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- Liu, Johan, 1960 (author)
- Institut des Nanotechnologies de Lyon
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- Fave, A. (author)
- Institut des Nanotechnologies de Lyon
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- Orobtchouk, R. (author)
- Institut des Nanotechnologies de Lyon
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- Mandorlo, F. (author)
- Institut des Nanotechnologies de Lyon
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- Seassal, C. (author)
- Institut des Nanotechnologies de Lyon
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- Massiot, Ines, 1987 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Dmitriev, Alexander, 1975 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Lee, K. (author)
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- Cabarrocas, P. R. I. (author)
- Université Paris-Saclay,University Paris-Saclay
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(creator_code:org_t)
- 2016-03-14
- 2016
- English.
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In: Journal of Physics D: Applied Physics. - : IOP Publishing. - 1361-6463 .- 0022-3727. ; 49:12
- Related links:
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http://dx.doi.org/10...
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https://doi.org/10.1...
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Abstract
Subject headings
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- The enhancement of light absorption via nanopatterning in crystalline silicon solar cells is becoming extremely important with the decrease of wafer thickness for the further reduction of solar cell fabrication cost. In order to study the influence of nanopatterning on crystalline silicon thin-film solar cells, we applied two lithography techniques (laser interference lithography and nanoimprint lithography) combined with two etching techniques (dry and wet) to epitaxial crystalline silicon thin films deposited via plasma-enhanced chemical vapor deposition at 175 degrees C. The influence of nanopatterning with different etching profiles on solar cell performance is studied. We found that the etching profiles (pitch, depth and diameter) have a stronger impact on the passivation quality (open circuit voltage and fill factor) than on the optical performance (short circuit current density) of the solar cells. We also show that nanopatterns obtained via wet-etching can improve solar cell performance; and in contrast, dry-etching leads to poor passivation related to the etching profile, surface damage, and/ or contamination introduced during the etching process.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- PECVD
- thin film
- solar cells
- nanophotonics
Publication and Content Type
- art (subject category)
- ref (subject category)
Find in a library
To the university's database
- By the author/editor
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Chen, W. H.
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Cariou, R.
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Foldyna, M.
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Depauw, V.
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Trompoukis, C.
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Drouard, E.
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show more...
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Lalouat, L.
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Harouri, A.
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Liu, Johan, 1960
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Fave, A.
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Orobtchouk, R.
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Mandorlo, F.
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Seassal, C.
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Massiot, Ines, 1 ...
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Dmitriev, Alexan ...
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Lee, K.
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Cabarrocas, P. R ...
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show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Condensed Matter ...
- Articles in the publication
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Journal of Physi ...
- By the university
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Chalmers University of Technology