Search: id:"swepub:oai:research.chalmers.se:1a10b8e4-0c2d-433b-b231-debffb1946fe" >
Applications of pla...
Applications of plasma assisted wafer bonding
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- Amirfeiz, Petra, 1973 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Sanz-Velasco, Anke, 1971 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Bring, Martin, 1977 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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show more...
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- Bengtsson, Stefan, 1961 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- 2002
- 2002
- English.
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In: Proceedings of the Workshop on wafer bonding, Barcelona, Spain.
- Related links:
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Subject headings
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Publication and Content Type
- kon (subject category)
- ref (subject category)
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