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Resolving mass spec...
Resolving mass spectral overlaps in atom probe tomography by isotopic substitutions – case of TiSi15N
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- Engberg, David (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Jensen, Jens (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Jensen, J. (author)
- Linköpings universitet,Linköping University
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- Thuvander, Mattias, 1968 (author)
- Chalmers tekniska högskola,Chalmers University of Technology,Department of Applied Physics, Chalmers University of Technology, Göteborg, Sweden
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- Hultman, Lars (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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(creator_code:org_t)
- Elsevier BV, 2018
- 2018
- English.
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In: Ultramicroscopy. - : Elsevier BV. - 1879-2723 .- 0304-3991. ; 184, s. 51-60
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Abstract
Subject headings
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- Mass spectral overlaps in atom probe tomography (APT) analyses of complex compounds typically limit the identification of elements and microstructural analysis of a material. This study concerns the TiSiN system, chosen because of severe mass-to-charge-state ratio overlaps of the 14 N + and 28 Si 2+ peaks as well as the 14N 2 + and 28 Si + peaks. By substituting 14 N with 15 N, mass spectrum peaks generated by ions composed of one or more N atoms will be shifted toward higher mass-to-charge-state ratios, thereby enabling the separation of N from the predominant Si isotope. We thus resolve thermodynamically driven Si segregation on the nanometer scale in cubic phase Ti 1- x Si x 15 N thin films for Si contents 0.08 ≤ x ≤ 0.19 by APT, as corroborated by transmission electron microscopy. The APT analysis yields a composition determination that is in good agreement with energy dispersive X-ray spectroscopy and elastic recoil detection analyses. Additionally, a method for determining good voxel sizes for visualizing small-scale fluctuations is presented and demonstrated for the TiSiN system.
Subject headings
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
- NATURVETENSKAP -- Kemi -- Annan kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Other Chemistry Topics (hsv//eng)
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- Mass spectral overlap
- Atom probe tomography (APT)
- Titanium silicon nitride (TiSiN)
- Time-of-flight mass spectrometry (TOFMS)
- Isotopic substitution
- Isotope enrichment
Publication and Content Type
- art (subject category)
- ref (subject category)
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