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Analysis of CV char...
Analysis of CV characterisitcs of plasma bonded wafers
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Colinge, Cindy (author)
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- Bengtsson, Stefan, 1961 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Amirfeiz, Petra, 1973 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Sanz-Velasco, Anke, 1971 (author)
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(creator_code:org_t)
- 2002
- 2002
- English.
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In: Presented at TMS, Electronics Materials Conference, Santa Barbara, USA.
- Related links:
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https://research.cha...
Subject headings
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Publication and Content Type
- kon (subject category)
- ref (subject category)
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