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Semiconductor Wafer Bonding - A Review Of Interfacial Properties And Applications
-
- Bengtsson, Stefan, 1961 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
- (creator_code:org_t)
- 1992
- 1992
- English.
- In: Journal Of Electronic Materials. ; 21:8, s. 841-862
- Journal article (peer-reviewed)
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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- art (subject category)
- ref (subject category)
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