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MEMS-based VCSEL be...
MEMS-based VCSEL beam steering using replicated polymer diffractive lens
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- Hedsten, Karin, 1964 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Melin, Jonas, 2005 (author)
- Uppsala universitet,Mikrostrukturteknik
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- Bengtsson, Jörgen, 1968 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Modh, Peter, 1968 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Karlén, David, 1979 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Löfving, Björn, 1970 (author)
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Nilsson, Richard (author)
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Rödjegård, Henrik, 1974 (author)
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Persson, Katrin (author)
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- Enoksson, Peter, 1957 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Nikolajeff, Fredrik (author)
- Uppsala universitet,Mikrostrukturteknik
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Andersson, G. (author)
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(creator_code:org_t)
- Elsevier BV, 2008
- 2008
- English.
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In: Sensors and Actuators, A: Physical. - : Elsevier BV. - 0924-4247 .- 1873-3069. ; 142:1, s. 336-345
- Related links:
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http://dx.doi.org/10...
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https://doi.org/10.1...
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Abstract
Subject headings
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- Abstract. This paper describes a fully integrated micro-optical system, in which dynamic angular control of the beam from a VCSEL (vertical cavity surface emitting laser) is realized by laterally moving a collimat¬ing diffractive lens in the light path. The lens is mounted on a translatable silicon stage, which consists of a frame with an opening for the light to traverse the lens and electro-statically driven comb actuators, by which the lateral movement is achieved. Devices implementing both 1D and 2D scanning have been fabricated and evaluated. Integration of the lens onto the translatable silicon stage is done using a newly developed fabrication process based on hot embossing of an amorphous fluorocarbon polymer. This fabrication process relies on a reversed-order protocol, where the structuring of the optical element precedes the silicon microstructuring. Assembly and packaging of the VCSEL-MOEMS system, using LTCC (low temperature cofired ceramic) technique, is also demonstrated. Optical evaluation of the system and beam steering function shows significant beam deflection for a relatively low driving voltage (~70 V).
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Beam steering
- Diffractive micro-optics
- VCSEL
- Replication
- MOEMS
- Microsystem
- TECHNOLOGY
Publication and Content Type
- art (subject category)
- ref (subject category)
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Hedsten, Karin, ...
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Melin, Jonas, 20 ...
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Bengtsson, Jörge ...
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Modh, Peter, 196 ...
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Karlén, David, 1 ...
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Löfving, Björn, ...
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show more...
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Nilsson, Richard
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Rödjegård, Henri ...
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Persson, Katrin
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Enoksson, Peter, ...
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Nikolajeff, Fred ...
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Andersson, G.
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show less...
- About the subject
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- ENGINEERING AND TECHNOLOGY
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and Other Electrical ...
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Sensors and Actu ...
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Chalmers University of Technology
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Uppsala University