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Effect of thermal a...
Effect of thermal annealing on structural properties of GeSn thin films grown by molecular beam epitaxy
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- Zhang, Z. P. (author)
- ShanghaiTech University,Chinese Academy of Sciences
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- Song, Y. X. (author)
- Chinese Academy of Sciences
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- Li, Y. (author)
- Chinese Academy of Sciences
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- Wu, X. Y. (author)
- Shanghai Jiao Tong University,Chinese Academy of Sciences
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- Zhu, Z. Y. S. (author)
- ShanghaiTech University,Chinese Academy of Sciences
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- Han, Y. (author)
- Chinese Academy of Sciences
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- Zhang, L. Y. (author)
- Chinese Academy of Sciences
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- Huang, H. (author)
- Chinese Academy of Sciences
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- Wang, Shu Min, 1963 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- AIP Publishing, 2017
- 2017
- English.
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In: AIP Advances. - : AIP Publishing. - 2158-3226 .- 2158-3226. ; 7:10
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Abstract
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- GeSn alloy with 7.68% Sn concentration grown by molecular beam epitaxy has been rapidly annealed at different temperatures from 300 degrees C to 800 degrees C. Surface morphology and roughness annealed below or equal to 500 degrees C for 1 min have no obvious changes, while the strain relaxation rate increasing. When the annealing temperature is above or equal to 600 degrees C, significant changes occur in surface morphology and roughness, and Sn precipitation is observed at 700 degrees C. The structural properties are analyzed by reciprocal space mapping in the symmetric (004) and asymmetric (224) planes by high resolution X-ray diffraction. The lateral correlation length and the mosaic spread are extracted for the epi-layer peaks in the asymmetric (224) diffraction. The most suitable annealing temperature to improve both the GeSn lattice quality and relaxation rate is about 500 degrees C.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Publication and Content Type
- art (subject category)
- ref (subject category)
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- By the author/editor
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Zhang, Z. P.
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Song, Y. X.
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Li, Y.
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Wu, X. Y.
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Zhu, Z. Y. S.
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Han, Y.
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Zhang, L. Y.
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Huang, H.
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Wang, Shu Min, 1 ...
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- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Condensed Matter ...
- Articles in the publication
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AIP Advances
- By the university
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Chalmers University of Technology