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51.
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52.
  • Chen, Si, et al. (författare)
  • Gate coupling and carrier distribution in silicon nanowire/nanoribbon transistors operated in electrolyte
  • 2011
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 29:1, s. 011022-
  • Tidskriftsartikel (refereegranskat)abstract
    • The transfer characteristics of back-gate silicon nanowire/nanoribbon (NW/NR) transistors measured in electrolyte exhibit a significantly higher on-current and a steeper subthreshold behavior than measured in air. Simulation results show that the gate capacitance for a NW/NR of a trapezoidal cross-section immersed in water is significantly higher than that exposed to air. Electrostatics simulations further show that for NWs/NRs with small widths, carriers are mainly accumulated at the two side-edges when they are immersed in water. Even the top surface of the NWs/NRs sees more accumulated carriers than the bottom one does; the latter is in fact located closest to the back-gate. These observations suggest that the interface properties at the side-edges and the top surface are crucial for NW/NR transistors to achieve high sensitivity when performing real-time sensing experiments in electrolyte. Finally, the sensitivity of back-gate NW/NR field-effect transistors to charge changes in electrolyte is found to have a weak dependence on the NW/NR width when the doping concentration is below 10(17) cm(-3). For higher NW/NR doping concentrations, narrower NWs/NRs are more sensitive.
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53.
  • Cho, H., et al. (författare)
  • High density plasma via hole etching in SiC
  • 2001
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 19:4, s. 1878-1881
  • Tidskriftsartikel (refereegranskat)abstract
    • Throughwafer vias up to 100 mum deep were formed in 4H-SiC substrates by inductively coupled plasma etching with SF6/O-2 at a controlled rate of similar to0.6 mum min(-1) and use of Al masks. Selectivities of > 50 for SiC over Al were achieved. Electrical (capacitance-voltage: current-voltage) and chemical (Auger electron spectroscopy) analysis techniques showed that the etching produced only minor changes in reverse breakdown voltage, Schottky barrier height, and near surface stoichiometry of the SiC and had high selectivity over common frontside metallization. The SiC etch rate was a strong function of the incident ion energy during plasma exposure. This process is attractive for power SiC transistors intended for high current, high temperature applications and also for SiC micromachining.
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54.
  • Choolakkal, Arun Haridas, et al. (författare)
  • Conformal chemical vapor deposition of boron-rich boron carbide thin films from triethylboron
  • 2023
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 41:1
  • Tidskriftsartikel (refereegranskat)abstract
    • We report conformal chemical vapor deposition (CVD) of boron carbide (BxC) thin films on silicon substrates with 8:1 aspect-ratio morphologies, using triethylboron [B(C2H5)(3)] as a single source CVD precursor. Step coverage (SC) calculated from the cross-sectional scanning electron microscopy measurements shows that films deposited at & LE;450 & DEG;C were highly conformal (SC = 1). We attribute this to the low reaction probability at low substrate temperatures enabling more gas phase diffusion into the features. The chemical state of the material, determined by x-ray photoelectron spectroscopy, shows as a carbide with B-B, B-C, C-B, and C-C chemical bonds. Quantitative analysis by time-of-flight elastic recoil detection analysis reveals that films deposited at 450 & DEG;C are boron-rich with around 82.5 at. % B, 15.6 at. % C, 1.3 at. % O, and 0.6 at. % H, i.e., about B5C. The film density as measured by x-ray reflectometry varies from 1.9 to 2.28 g/cm(3) depending on deposition temperature. (C) 2022 Author(s).All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY)license (http://creativecommons.org/licenses/by/4.0/).
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55.
  • Chubarov, Mikhail, et al. (författare)
  • Challenge in determining the crystal structure of epitaxial 0001 oriented sp(2)-BN films
  • 2018
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 36:3
  • Forskningsöversikt (refereegranskat)abstract
    • Boron nitride (BN) as a thin film is promising for many future electronic applications. On 0001 alpha-Al2O3 and 0001 4H/6H-SiC substrates, chemical vapor deposition yields epitaxial sp(2)-hybridized BN (sp(2)-BN) films oriented around the c-axis. Here, the authors seek to point out that sp(2)-BN can form two different polytypes; hexagonal BN (h-BN) and rhombohedral BN (r-BN), only differing in the stacking of the basal planes but with the identical distance between the basal planes and in-plane lattice parameters. This makes structural identification challenging in c- axis oriented films. The authors suggest the use of a combination of high-resolution electron microscopy with careful sample preparation and thin film x-ray diffraction techniques like pole figure measurements and glancing incidence (in-plane) diffraction to fully distinguish h-BN from r-BN. (C) 2018 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license.
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56.
  • Chubarov, Mikhail, et al. (författare)
  • Initial stages of growth and the influence of temperature during chemical vapor deposition of sp(2)-BN films
  • 2015
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 33:6, s. 061520-
  • Tidskriftsartikel (refereegranskat)abstract
    • Knowledge of the structural evolution of thin films, starting by the initial stages of growth, is important to control the quality and properties of the film. The authors present a study on the initial stages of growth and the temperature influence on the structural evolution of sp(2) hybridized boron nitride (BN) thin films during chemical vapor deposition (CVD) with triethyl boron and ammonia as precursors. Nucleation of hexagonal BN (h-BN) occurs at 1200 degrees C on alpha-Al2O3 with an AlN buffer layer (AlN/alpha-Al2O3). At 1500 degrees C, h-BN grows with a layer-by-layer growth mode on AlN/alpha-Al2O3 up to similar to 4 nm after which the film structure changes to rhombohedral BN (r-BN). Then, r-BN growth proceeds with a mixed layer-by-layer and island growth mode. h-BN does not grow on 6H-SiC substrates; instead, r-BN nucleates and grows directly with a mixed layer-by-layer and island growth mode. These differences may be caused by differences in substrate surface temperature due to different thermal conductivities of the substrate materials. These results add to the understanding of the growth process of sp(2)-BN employing CVD. (C) 2015 American Vacuum Society.
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57.
  • Chun, JS, et al. (författare)
  • Synchrotron x-ray diffraction and transmission electron microscopy studies of interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers
  • 2001
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - 0734-2101 .- 1520-8559. ; 19:1, s. 182-191
  • Tidskriftsartikel (refereegranskat)abstract
    • Dense fully-002-textured polycrystalline TiN layers, 110 nm thick with a N/TI ratio of 1.02+/-0.03, were grown on SiO2 by ultrahigh vacuum magnetically unbalanced magnetron sputter deposition at T-s = 450 degreesC in pure N-2 utilizing high N-2(+)/Ti Aux ratios and low energy (E-N2(+) = 20 eV) ion irradiation of the growing film. Al overlayers, 160 nm thick and possessing a strong 002 texture inherited from the underlying TiN, were then deposited at T-s = 100 degreesC without breaking vacuum. Synchrotron x-ray diffraction was used to follow interfacial reaction paths and kinetics during postdeposition annealing as a function of time (t(a) = 200 - 1200 s) and temperature (T-a = 500 - 580 degreesC). Changes in bilayer microstructure and microchemistry were investigated using transmission electron microscopy (TEM) and scanning TEM to obtain compositional maps of cross-sectional and plan-view specimens by energy dispersive x-ray analysis. The initial bilayer reaction step during annealing involves the formation of a continuous AIN interfacial layer which, due to local epitaxy with the TIN underlayer, grows with the metastable zinc-blende structure up to a thickness x similar or equal to3-5 nm, and with the wurtzite structure thereafter. Ti atoms released during AIN formation diffuse into the Al layer leading to supersaturation followed by the nucleation of dispersed regions of tetragonal Al3Ti with inherited 002 preferred orientation. The aluminide domains grow rapidly until they reach the free surface, thereafter growth is two dimensional as Al3Ti grains spread radially. The overall activation energy for Al3Ti formation and growth is 1.8+/-0.1 eV. In situ synchrotron x-ray diffraction analyses during thermal ramping show that the onset temperature for interfacial reactions was increased by more than 100 degreesC for fully dense completely 002-textured bilayers compared to Ill-textured bilayers deposited by conventional reactive sputter deposition. (C) 2001 American Vacuum Society.
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58.
  • Deminskyi, Petro, 1987-, et al. (författare)
  • Atomic layer deposition of InN using trimethylindium and ammonia plasma
  • 2019
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 37:2
  • Tidskriftsartikel (refereegranskat)abstract
    • Indium nitride (InN) is a low bandgap, high electron mobility semiconductor material of interest to optoelectronics and telecommunication. Such applications require the deposition of uniform crystalline InN thin films on large area substrates, with deposition temperatures compatible with this temperature-sensitive material. As conventional chemical vapor deposition (CVD) struggles with the low temperature tolerated by the InN crystal, the authors hypothesize that a time-resolved, surface-controlled CVD route could offer a way forward for InN thin film deposition. In this work, the authors report atomic layer deposition of crystalline, wurtzite InN thin films using trimethylindium and ammonia plasma on Si(100). They found a narrow atomic layer deposition window of 240-260 degrees C with a deposition rate of 0.36 A/cycle and that the flow of ammonia into the plasma is an important parameter for the crystalline quality of the film. X-ray diffraction measurements further confirmed the polycrystalline nature of InN thin films. X-ray photoelectron spectroscopy measurements show nearly stoichiometric InN with low carbon level (amp;lt;1 at. %) and oxygen level (amp;lt;5 at. %) in the film bulk. The low carbon level is attributed to a favorable surface chemistry enabled by the NH3 plasma. The film bulk oxygen content is attributed to oxidation upon exposure to air via grain boundary diffusion and possibly by formation of oxygen containing species in the plasma discharge. Published by the AVS.
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59.
  • Deminskyi, Petro, et al. (författare)
  • Surface ligand removal in atomic layer deposition of GaN using triethylgallium
  • 2021
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 39:1
  • Tidskriftsartikel (refereegranskat)abstract
    • Gallium nitride (GaN) is one of the most important semiconductor materials in modern electronics. While GaN films are routinely deposited by chemical vapor deposition at around 1000 degrees C, low-temperature routes for GaN deposition need to be better understood. Herein, we present an atomic layer deposition (ALD) process for GaN-based on triethyl gallium (TEG) and ammonia plasma and show that the process can be improved by adding a reactive pulse, a "B-pulse" between the TEG and ammonia plasma, making it an ABC-type pulsed process. We show that the material quality of the deposited GaN is not affected by the B-pulse, but that the film growth per ALD cycle increases when a B-pulse is added. We suggest that this can be explained by the removal of ethyl ligands from the surface by the B-pulse, enabling a more efficient nitridation by the ammonia plasma. We show that the B-pulsing can be used to enable GaN deposition with a thermal ammonia pulse, albeit of x-ray amorphous films.
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60.
  • Edström, Daniel, et al. (författare)
  • Large-scale molecular dynamics simulations of TiN/TiN(001) epitaxial film growth
  • 2016
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 34:4, s. 041509-1-041509-9
  • Tidskriftsartikel (refereegranskat)abstract
    • Large-scale classical molecular dynamics simulations of epitaxial TiN/TiN(001) thin film growth at 1200K are carried out using incident flux ratios N/Ti -1, 2, and 4. The films are analyzed as a function of composition, island size distribution, island edge orientation, and vacancy formation. Results show that N/Ti-1 films are globally understoichiometric with dispersed Ti-rich surface regions which serve as traps to nucleate 111-oriented islands, leading to local epitaxial breakdown. Films grown with N/Ti=2 are approximately stoichiometric and the growth mode is closer to layer-by-layer, while N/Ti-4 films are stoichiometric with N-rich surfaces. As N/Ti is increased from 1 to 4, island edges are increasingly polar, i. e., 110-oriented, and N-terminated to accommodate the excess N flux, some of which is lost by reflection of incident N atoms. N vacancies are produced in the surface layer during film deposition with N/Ti-1 due to the formation and subsequent desorption of N-2 molecules composed of a N adatom and a N surface atom, as well as itinerant Ti adatoms pulling up N surface atoms. The N vacancy concentration is significantly reduced as N/Ti is increased to 2; with N/Ti-4, Ti vacancies dominate. Overall, our results show that an insufficient N/Ti ratio leads to surface roughening via nucleation of small dispersed 111 islands, whereas high N/Ti ratios result in surface roughening due to more rapid upper-layer nucleation and mound formation. The growth mode of N/Ti-2 films, which have smoother surfaces, is closer to layer-by-layer. (C) 2016 American Vacuum Society.
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61.
  • Edström, Daniel, 1986-, et al. (författare)
  • Mechanical properties of VMoNO as a function of oxygen concentration : Toward development of hard and tough refractory oxynitrides
  • 2019
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 37:6
  • Tidskriftsartikel (refereegranskat)abstract
    • Improved toughness is a central goal in the development of wear-resistant refractory ceramic coatings. Extensive theoretical and experimental research has revealed that NaCl-structure VMoN alloys exhibit surprisingly high ductility combined with high hardness and toughness. However, during operation, protective coatings inevitably oxidize, a problem that may compromise material properties and performance. Here, the authors explore the role of oxidation in altering VMoN properties. Density functional theory and theoretical intrinsic hardness models are used to investigate the mechanical behavior of cubic V0.5Mo0.5N1-xOx solid solutions as a function of the oxygen concentration x. Elastic constant and intrinsic hardness calculations show that oxidation does not degrade the mechanical properties of V0.5Mo0.5N. Electronic structure analyses indicate that the presence of oxygen reduces the covalent bond character, which slightly lowers the alloy strength and intrinsic hardness. Nevertheless, the character of metallic d-d states, which are crucial for allowing plastic deformation and enhancing toughness, remains unaffected. Overall, the authors' results suggest that VMoNO oxynitrides, with oxygen concentrations as high as 50%, possess high intrinsic hardness, while still being ductile. Published by the AVS.
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62.
  • Eklund, Per, et al. (författare)
  • Magnetron sputtering of Ti3SiC2 thin films from a Ti3SiC2 compound target
  • 2007
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 25:5, s. 1381-1388
  • Tidskriftsartikel (refereegranskat)abstract
    • Ti3 Si C2 thin films were synthesized by magnetron sputtering from Ti3 Si C2 and Ti targets. Sputtering from a Ti3 Si C2 target alone resulted in films with a C content of ∼50 at. % or more, due to gas-phase scattering processes and differences in angular and energy distributions between species ejected from the target. Addition of Ti to the deposition flux from a Ti3 Si C2 target is shown to bind the excess C in Ti Cx intergrown with Ti3 Si C2 and Ti4 Si C3. Additionally, a substoichiometric Ti Cx buffer layer is shown to serve as a C sink and enable the growth of Ti3 Si C2.
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63.
  • Elisabeth, Abom A., et al. (författare)
  • Properties of combined TiN and Pt thin films applied to gas sensing
  • 2002
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 20:3, s. 667-673
  • Tidskriftsartikel (refereegranskat)abstract
    • The effect of Pt in the proximity of TiN with respect to the oxidation behavior was addressed. TiN was grown at two different temperatures that are known to produce films with varying porosity. Pt was used as the catalytic metal and either deposited on top of the TiN film grown at 400°C or co-sputtered in a reactive atmosphere of Ar and N2 at the two different deposition temperatures. The films were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), atomic force microscopy (AFM), x-ray diffraction, Auger electron spectroscopy (AES), and x-ray photoemission spectroscopy (XPS), and the gas response of the sensor to hydrogen, ammonia, propene, and acetaldehyde was measured. Aging studies were also carried out for a period of one month. Overall, significant results were obtained.
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64.
  • Ericsson, Leif, et al. (författare)
  • ZnO nanocrystals on SiO2/Si surfaces thermally cleaned in ultrahigh vacuum and characterized using spectroscopic photoemission and low energy electron microscopy
  • 2010
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 1520-8559 .- 0734-2101. ; 28:3, s. 438-442
  • Tidskriftsartikel (refereegranskat)abstract
    • Thermal cleaning in ultrahigh vacuum of ZnO nanocrystals distributed on SiO2/Si surfaces has been studied using spectroscopic photoemission and low energy electron microscopy (SPELEEM). This study thus concern weakly bound ZnO nanocrystals covering only 5%-10% of the substrate. Chemical properties, crystallinity, and distribution of nanocrystals are used to correlate images acquired with the different techniques showing excellent correspondence. The nanocrystals are shown to be clean enough after thermal cleaning at 650 degrees C to be imaged by LEEM and x-ray PEEM as well as chemically analyzed by site selective x-ray photoelectron spectroscopy (mu-XPS). mu-XPS shows a sharp Zn 3d peak and resolve differences in O 1s states in oxides. The strong LEEM reflections together with the obtained chemical information indicates that the ZnO nanocrystals were thermally cleaned, but do not indicate any decomposition of the nanocrystals. mu-XPS was also used to determine the thickness of SiO2 on Si. This article is the first to our knowledge where the versatile technique SPELEEM has been used to characterize ZnO nanocrystals.
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65.
  • Fager, Hanna, et al. (författare)
  • Novel hard, tough HfAlSiN multilayers, defined by alternating Si bond structure, deposited using modulated high-flux, low-energy ion irradiation of the growing film
  • 2015
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 33:5, s. 05E103-1-05E103-9
  • Tidskriftsartikel (refereegranskat)abstract
    • Hf1-x-yAlxSiyN (0 less than= x less than= 0.14, 0 less than= y less than= 0.12) single layer and multilayer films are grown on Si(001) at 250 degrees C using ultrahigh vacuum magnetically unbalanced reactive magnetron sputtering from a single Hf0.6Al0.2Si0.2 target in mixed 5%-N-2/Ar atmospheres at a total pressure of 20 mTorr (2.67 Pa). The composition and nanostructure of Hf1-x-yAlxSiyN films are controlled by varying the energy Ei of the ions incident at the film growth surface while maintaining the ion-to-metal flux ratio constant at eight. Switching E-i between 10 and 40 eV allows the growth of Hf0.78Al0.10Si0.12N/Hf0.78Al0.14Si0.08N multilayers with similar layer compositions, but in which the Si bonding state changes from predominantly Si-Si/Si-Hf for films grown with E-i = 10 eV, to primarily Si-N with E-i = 40 eV. Multilayer hardness values, which vary inversely with bilayer period Lambda, range from 20 GPa with Lambda = 20 nm to 27 GPa with Lambda = 2 nm, while fracture toughness increases directly with Lambda. Multilayers with Lambda = 10nm combine relatively high hardness, H similar to 24GPa, with good fracture toughness. (C) 2015 American Vacuum Society.
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66.
  • Fager, Hanna, et al. (författare)
  • Thermal stability and mechanical properties of amorphous arc evaporated Ti-B-Si-N and Ti-B-Si-Al-N coatings grown by cathodic arc evaporation from TiB2, Ti33Al67, and Ti85Si15 cathodes
  • 2014
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 32:6, s. 061508-
  • Tidskriftsartikel (refereegranskat)abstract
    • Ti-B-Al-N, Ti-B-Si-N, and Ti-B-Si-Al-N coatings were grown on cemented carbide substrates in an industrial scale cathodic arc evaporation system using Ti33Al67, Ti85Si15, and TiB2 cathodes in a reactiveN2 atmosphere. The microstructure of the as-deposited coatings changes from nanocrystalline to amorphous with addition of (B+Si+Al), or high amounts of (B+Si) to TiN. In the as-deposited state, the 4 μm-thick amorphous coatings are dense and homogenous, besides slight compositional modulation with Ti-rich layers induced by rotation of the substrate holder fixture during deposition, and have unusually few macroparticles. Annealing at temperatures ranging from 700 °C to 1100 °C results in that the coatings crystallize by clustering of TiN grains. The hardness of as-deposited amorphous coatings is 17-18 GPa, and increases to 21 GPa following annealing at 800 °C. At annealing temperatures of 1000 °C and above the hardness decreases due to inter-diffusion of Co from the substrate to the coating.
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67.
  • Fiantok, Tomas, et al. (författare)
  • Structure evolution and mechanical properties of co-sputtered Zr-Al-B-2 thin films
  • 2022
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 40:3
  • Tidskriftsartikel (refereegranskat)abstract
    • Zirconium diboride (ZrB2) represents a promising hard coating material for demanding high-temperature applications and could provide an excellent basis for fine-tuning mechanical properties via the concept of alloying. Here, combining density functional theory and experiments, we investigate the effect of aluminum alloying on thermally induced structure evolution and mechanical properties of alpha-structured Zr1-xAlxB2+Delta. Ab initio calculations predict a strong tendency for spinodal phase separation of hexagonal Zr1-xAlxB2 solid solution into isostructural binaries. Experimental results confirm predictions of the insolubility of aluminum in the ZrB2 phase when the structure of magnetron co-sputtered Zr0.72Al0.28B2.64 films with an aluminum content of 8 at. % has a nanocomposite character consisting of hexagonal alpha-ZrB2 nanocolumns surrounded by an amorphous Al-rich tissue phase. The films are structurally stable up to 1100 degrees C but out-diffusion of Al atoms from boundary regions during annealing was observed. Al alloying causes a significant decrease in hardness when the hardness of the reference as-deposited ZrB2.2 and Zr0.72Al0.28B2.64 is 39 and 23 GPa, respectively. Low hardening effect in ternaries was observed after annealing at 1000 degrees C when the hardness increased from 23.5 to 26.5 GPa due to the locally increased concentration of point defects at the boundaries of the nanocolumns and Al-rich tissue phases. Youngs modulus decrease from 445 (ZrB2.2) to 345 GPa (Zr0.72Al0.28B2.64) indicates a change in the mechanical response of the ternary film toward more ductile behavior.
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68.
  • Forsén, Rikard, et al. (författare)
  • Decomposition and phase transformation in TiCrAlN thin coatings
  • 2012
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 30:6
  • Tidskriftsartikel (refereegranskat)abstract
    • Phase transformations and mechanisms that yield enhanced high temperature mechanical properties of metastable solid solutions of cubic (c)-(TixCryAlz)N coatings are discussed in this paper. Coatings grown by reactive arc evaporation technique with metal composition range y<17 at. % and 45h)-AlN is formed compared to TiAlN. The improved thermal stability is discussed in terms of a lowered coherency stress and a lowered enthalpy of mixing due to the addition of Cr, which results in improved functionality in the working temperature range of 850-1000 ºC of for example cutting tools. Upon annealing up to 1400 ºC the coatings decompose into c-TiN, bcc-Cr and h-AlN. The decomposition takes place via several intermediate phases, c-CrAlN, c-TiCrN and hexagonal (β)-Cr2N. The microstructure  evolution investigated at different stages of spinodal decomposition and phase transformation is correlated to the thermal response and mechanical hardness of the coatings.
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69.
  • Gangaprasad Rao, Smita, et al. (författare)
  • Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering
  • 2023
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 41:5
  • Tidskriftsartikel (refereegranskat)abstract
    • Low-temperature epitaxial growth of multicomponent alloy-based thin films remains an outstanding challenge in materials science and is important for established fundamental properties of these complex materials. Here, Cantor nitride (CrMnFeCoNi)N thin films were epitaxially grown on MgO(100) substrates at low deposition temperature by magnetic-field-assisted dc-magnetron sputtering, a technique where a magnetic field is applied to steer the dense plasma to the substrate thereby influencing the flux of Ar-ions bombarding the film during growth. Without ion bombardment, the film displayed textured growth. As the ion flux was increased, the films exhibited epitaxial growth. The epitaxial relationship between film and substrate was found to be cube on cube (001)film parallel to(001)MgO, [100]film parallel to[100]MgO. The epitaxy was retained up to a thickness of approximately similar to 100 nm after which the growth becomes textured with a 002 out-of-plane orientation. The elastic constants determined by Brillouin inelastic light scattering were found to be C-11 = 320 GPa, C-12 = 125 GPa, and C-44 = 66 GPa, from which the polycrystalline Young's modulus was calculated as 204 GPa and Poisson's ratio = 0.32, whereas available elastic properties still remained very scarce.
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70.
  • Gerdin Hulkko, Johan, et al. (författare)
  • Kinetics of the low-pressure chemical vapor deposited tungsten nitride process using tungsten hexafluoride and ammonia precursors
  • 2021
  • Ingår i: Journal of Vacuum Science and Technology A. - : American Vacuum Society. - 1520-8559 .- 0734-2101. ; 39:6, s. 063403-
  • Tidskriftsartikel (refereegranskat)abstract
    • Tungsten nitride (WNx) is a hard refractory material with low electrical resistance that can be deposited using multiple methods. This study focuses on the microstructrual development of low pressure chemical vapor deposition grown WNx coatings. Also, the growth kinetics is studied and discussed in terms of the resulting microstructures. Samples of WNx were deposited using WF6, NH3, and Ar at 592–887 K in a hot-wall reactor with variable gas mixture compositions (NH3:WF6 = 0.5–25). The coatings were nitrogen-rich (x ∼ 1.65) and oxygen-free as determined by time-of-flight-elastic recoil detection analysis. X-ray diffraction showed that the coatings transformed from being amorphous to crystallizing as β-W2N at 641–690 K. The morphologies changed with deposition temperature. Being very fine grained and nodular at deposition temperatures 740 K and below, increasing the deposition temperature to 789 K while employing a NH3:WF6 molar ratio of 1, large disc-shaped protrusions were formed. When increasing the NH3:WF6 molar ratio to 25, striped facets became increasingly dominant. Investigating the latter by transmission electron microscopy, a microstructure of smaller ridges formed by twinning, oriented as <211> in the out-of-plane direction, was revealed across the facet surfaces. Transmission Kikuchi diffraction confirmed that <211> was the texture of these coatings. The partial reaction order of WF6 and NH3 at 740 K was determined to be close to 1/6 and 1/2, respectively. The apparent activation energy ranged from 82 to 12 kJ/mol corresponding to deposition temperatures from 592 to 887 K.
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71.
  • Gontad, Francisco, et al. (författare)
  • Fabrication of Nb/Pb structures through ultrashort pulsed laser deposition
  • 2016
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 34:4
  • Tidskriftsartikel (refereegranskat)abstract
    • This work reports the fabrication of Nb/Pb structures with an application as photocathode devices. The use of relatively low energy densities for the ablation of Nb with ultrashort pulses favors the reduction of droplets during the growth of the film. However, the use of laser fluences in this ablation regime results in a consequent reduction in the average deposition rate. On the other hand, despite the low deposition rate, the films present a superior adherence to the substrate and an excellent coverage of the irregular substrate surface, avoiding the appearance of voids or discontinuities on the film surface. Moreover, the low energy densities used for the ablation favor the growth of nanocrystalline films with a similar crystalline structure to the bulk material. Therefore, the use of low ablation energy densities with ultrashort pulses for the deposition of the Nb thin films allows the growth of very adherent and nanocrystalline films with adequate properties for the fabrication of Nb/Pb structures to be included in superconducting radiofrequency cavities. (C) 2016 American Vacuum Society.
  •  
72.
  • Gontad, Francisco, et al. (författare)
  • Growth of lead thin films on silicon and niobium substrates by sputtering technique
  • 2017
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 35:3
  • Tidskriftsartikel (refereegranskat)abstract
    • In this paper, the authors report the growth of Pb thin films on both Si and Nb substrates by radio-frequency sputtering technique. Deposited films were characterized and tested to deduce the structure, the morphology, the nanomechanical properties, and also the quantum efficiency. Granular structures and large presence of voids were observed by scanning electron microscopy; moreover, the roughness and grain size of the film surface, investigated by surface probe microscopy, increased with the film thickness. Crystallographic orientation, studied by x-ray diffraction, showed the growth of polycrystalline Pb thin films and the presence of weak diffraction peaks related to penta-lead oxide (Pb5O8). The nanomechanical analysis reveals a film hardness with a value (similar to 1.5GPa) well beyond the hardness of Pb bulk (0.04GPa). Finally, twin Pb thin films deposited on Nb substrates were tested as photocathodes showing its great potentiality to be used in superconducting radio-frequency guns with a quantum efficiency of 5 x 10(-5). (C) 2017 American Vacuum Society.
  •  
73.
  • Gorishnyy, T.Z., et al. (författare)
  • Optimization of wear-resistant coating architectures using finite element analysis
  • 2003
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 21:1, s. 332-339
  • Tidskriftsartikel (refereegranskat)abstract
    • The design of successful wear-resistant coating architectures requires simultaneous consideration of several factors. In particular, coatings which consist of CrN layers of varying thickness separated by thin Cr layers have the highest wear resistance for both aluminum and steel substrate materials, but a methodology was needed to optimize both the overall coating design and the individual layer thicknesses. This paper provides an initial step toward the development of future application specific coating designs and improved coating design methodologies.
  •  
74.
  • Greczynski, Grzegorz, 1973-, et al. (författare)
  • Al capping layers for non-destructive x-ray photoelectron spectroscopy analyses of transition-metal nitride thin films
  • 2015
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 33, s. 05E101-1-05E101-9
  • Tidskriftsartikel (refereegranskat)abstract
    • X-ray photoelectron spectroscopy (XPS) compositional analyses of materials that have been air exposed typically require ion etching in order to remove contaminated surface layers. However, the etching step can lead to changes in sample surface and near-surface compositions due to preferential elemental sputter ejection and forward recoil implantation; this is a particular problem for metal/gas compounds and alloys such as nitrides and oxides. Here, we use TiN as a model system and compare XPS analysis results from three sets of polycrystalline TiN/Si(001) films deposited by reactive magnetron sputtering in a separate vacuum chamber. The films are either (a) air-exposed for ? 10 min prior to insertion into the ultra-high-vacuum (UHV) XPS system; (b) air-exposed and subject to ion etching, using different ion energies and beam incidence angles, in the XPS chamber prior to analysis; or (c) Al-capped in-situ in the deposition system prior to air-exposure and loading into the XPS instrument.We show that thin, 1.5-6.0 nm, Al capping layers provide effective barriers to oxidation and contamination of TiN surfaces, thus allowing non-destructive acquisition of high-resolution core-level spectra representative of clean samples, and, hence, correct bonding assignments. The Ti 2p and N 1s satellite features, which are sensitive to ion bombardment, exhibit high intensities comparable to those obtained from single-crystal TiN/MgO(001) films grown and analyzed in-situ in a UHV XPS system and there is no indication of Al/TiN interfacial reactions. XPS-determined N/Ti concentrations acquired from Al/TiN samples agree very well with Rutherford backscattering and elastic recoil analysis results while ion-etched air-exposed samples exhibit strong N loss due to preferential resputtering. The intensities and shapes of the Ti 2p and N 1s core level signals from Al/TiN/Si(001) samples do not change following long-term (up to 70 days) exposure to ambient conditions indicating that the thin Al capping layers provide stable surface passivation without spallation.
  •  
75.
  • Greczynski, Grzegorz, 1973-, et al. (författare)
  • Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar
  • 2017
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 35:6
  • Tidskriftsartikel (refereegranskat)abstract
    • The authors use energy- and time-dependent mass spectrometry to analyze the evolution of metal- and gas-ion fluxes incident at the substrate during high-power pulsed magnetron sputtering (HiPIMS) of groups IVb and VIb transition-metal (TM) targets in Ar. For all TMs, the time-and energy-integrated metal/gas-ion ratio at the substrate plane NMe+/NAr+ increases with increasing peak target current density J(T,peak) due to rarefaction. In addition, NMe+/NAr+ exhibits a strong dependence on metal/gas-atom mass ratio m(Me)/m(g) and varies from similar to 1 for Ti (m(Ti)/m(Ar) = 1.20) to similar to 100 for W (m(W)/m(Ar) = 4.60), with J(T,peak) maintained constant at 1 A/cm(2). Time-resolved ion-energy distribution functions confirm that the degree of rarefaction scales with m(Me)/m(g): for heavier TMs, the original sputtered-atom Sigmund-Thompson energy distributions are preserved long after the HiPIMS pulse, which is in distinct contrast to lighter metals for which the energy distributions collapse into a narrow thermalized peak. Hence, precise timing of synchronous substrate-bias pulses, applied in order to reduce film stress while increasing densification, is critical for metal/gas combinations with m(Me)/m(g) near unity, while with m(Me)/m(g) amp;gt;amp;gt; 1, the width of the synchronous bias pulse is essentially controlled by the metal-ion time of flight. The good agreement between results obtained in an industrial system employing 440 cm(2) cathodes and a laboratory-scale system with a 20 cm(2) target is indicative of the fundamental nature of the phenomena. 
  •  
76.
  • Greczynski, Grzegorz, et al. (författare)
  • Metal versus rare-gas ion irradiation during Ti1-xAlxN film growth by hybrid high power pulsed magnetron/dc magnetron co-sputtering using synchronized pulsed substrate bias
  • 2012
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 30:6
  • Tidskriftsartikel (refereegranskat)abstract
    • Metastable NaCl-structure Ti1-xAlxN is employed as a model system to probe the effects of metal versus rare-gas ion irradiation during film growth using reactive high-power pulsed magnetron sputtering (HIPIMS) of Al and dc magnetron sputtering of Ti. The alloy film composition is chosen to be x = 0.61, near the kinetic solubility limit at the growth temperature of 500 degrees C. Three sets of experiments are carried out: a -60V substrate bias is applied either continuously, in synchronous with the full HIPIMS pulse, or in synchronous only with the metal-rich-plasma portion of the HIPIMS pulse. Alloy films grown under continuous dc bias exhibit a thickness-invariant small-grain, two-phase nanostructure (wurtzite AlN and cubic Ti1-xAlxN) with random orientation, due primarily to intense Ar+ irradiation leading to Ar incorporation (0.2 at. %), high compressive stress (-4.6 GPa), and material loss by resputtering. Synchronizing the bias with the full HIPIMS pulse results in films that exhibit much lower stress levels (-1.8GPa) with no measureable Ar incorporation, larger grains elongated in the growth direction, a very small volume fraction of wurtzite AlN, and random orientation. By synchronizing the bias with the metal-plasma phase of the HIPIMS pulses, energetic Ar+ ion bombardment is greatly reduced in favor of irradiation predominantly by Al+ ions. The resulting films are single phase with a dense competitive columnar structure, strong 111 orientation, no measureable trapped Ar concentration, and even lower stress (-0.9 GPa). Thus, switching from Ar+ to Al+ bombardment, while maintaining the same integrated incident ion/metal ratio, eliminates phase separation, minimizes renucleation during growth, and reduces the high concentration of residual point defects, which give rise to compressive stress.
  •  
77.
  • Greczynski, Grzegorz, et al. (författare)
  • Novel strategy for low-temperature, high-rate growth of dense, hard, and stress-free refractory ceramic thin films
  • 2014
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 32:4, s. 041515-
  • Tidskriftsartikel (refereegranskat)abstract
    • Growth of fully dense refractory thin films by means of physical vapor deposition (PVD) requires elevated temperatures T-s to ensure sufficient adatom mobilities. Films grown with no external heating are underdense, as demonstrated by the open voids visible in cross-sectional transmission electron microscopy images and by x-ray reflectivity results; thus, the layers exhibit low nanoindentation hardness and elastic modulus values. Ion bombardment of the growing film surface is often used to enhance densification; however, the required ion energies typically extract a steep price in the form of residual rare-gas-ion-induced compressive stress. Here, the authors propose a PVD strategy for the growth of dense, hard, and stress-free refractory thin films at low temperatures; that is, with no external heating. The authors use TiN as a model ceramic materials system and employ hybrid high-power pulsed and dc magnetron co-sputtering (HIPIMS and DCMS) in Ar/N-2 mixtures to grow dilute Ti1-xTaxN alloys on Si(001) substrates. The Ta target driven by HIPIMS serves as a pulsed source of energetic Ta+/Ta2+ metal-ions, characterized by in-situ mass and energy spectroscopy, while the Ti target operates in DCMS mode (Ta-HIPIMS/Ti-DCMS) providing a continuous flux of metal atoms to sustain a high deposition rate. Substrate bias V-s is applied in synchronous with the Ta-ion portion of each HIPIMS pulse in order to provide film densification by heavy-ion irradiation (m(Ta) = 180.95 amu versus m(Ti) = 47.88 amu) while minimizing Ar+ bombardment and subsequent trapping in interstitial sites. Since Ta is a film constituent, primarily residing on cation sublattice sites, film stress remains low. Dense Ti0.92Ta0.08N alloy films, 1.8 mu m thick, grown with T-s less than= 120 degrees C (due to plasma heating) and synchronized bias, V-s = 160 V, exhibit nanoindentation hardness H = 25.9 GPa and elastic modulus E = 497 GPa compared to 13.8 and 318 GPa for underdense Ti-HIPIMS/Ti-DCMS TiN reference layers (T-s less than 120 degrees C) grown with the same V-s, and 7.8 and 248 GPa for DCMS TiN films grown with no applied bias (T-s less than 120 degrees C). Ti0.92Ta0.08N residual stress is low, sigma = -0.7 GPa, and essentially equal to that of Ti-HIPIMS/Ti-DCMS TiN films grown with the same substrate bias.
  •  
78.
  • Greczynski, Grzegorz, et al. (författare)
  • Paradigm shift in thin-film growth by magnetron sputtering: From gas-ion to metal-ion irradiation of the growing film
  • 2019
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 37:6
  • Tidskriftsartikel (refereegranskat)abstract
    • Ion refractory ceramic thin films grown at low temperatures by magnetron sputtering. However, in contrast to gas-ion bombardment, the effects of metal-ion irradiation on properties of refractory ceramic thin films have not been extensively studied due to (i) low metal-ion concentrations (a few percents) during standard direct-current magnetron sputtering (DCMS) and (ii) difficulties in separating metal-ion from gas-ion fluxes. Recently, the situation has changed dramatically, thanks to the development of highpower impulse magnetron sputtering (HiPIMS), which provides highly-ionized metal-ion plasmas. In addition, careful choice of sputtering conditions allows exploitation of gas-rarefaction effects such that the charge state, energy, and momentum of metal ions incident at the growing film surface can be tuned. This is possible via the use of pulsed substrate bias, synchronized to the metal-ion-rich portion of each HiPIMS pulse. In this review, the authors begin by summarizing the results of time-resolved mass spectrometry analyses performed at the substrate position during HiPIMS and HiPIMS/DCMS cosputtering of transition-metal (TM) targets in Ar and Ar/N-2 atmospheres. Knowledge of the temporal evolution of metal- and gas-ion fluxes is essential for precise control of the incident metal-ion energy and for minimizing the role of gas-ion irradiation. Next, the authors review results on the growth of binary, pseudobinary, and pseudoternary TM nitride alloys by metal-ion-synchronized HiPIMS. In contrast to gas ions, a fraction of which are trapped at interstitial sites, metal ions are primarily incorporated at lattice sites resulting in much lower compressive stresses. In addition, the closer mass match with the film-forming species results in more efficient momentum transfer and provides the recoil density and energy necessary to eliminate film porosity at low deposition temperatures. Several novel film-growth pathways have been demonstrated: (i) nanostructured N-doped bcc-CrN0.05 films combining properties typically associated with both metals and ceramics, (ii) fully-dense, hard, and stress-free Ti0.39Al0.61N, (iii) single-phase cubic Ti1-xSixN with the highest reported SiN concentrations, (iv) unprecedented AlN supersaturation in single-phase NaCl-structure V1-xAlxN, and (v) a dramatic increase in the hardness, due to selective heavy-metal ion bombardment during growth, of dense Ti0.92Ta0.08N films deposited with no external heating. (C) 2019 Author(s).
  •  
79.
  • Greczynski, Grzegorz, et al. (författare)
  • Time evolution of ion fluxes incident at the substrate plane during reactive high-power impulse magnetron sputtering of groups IVb and VIb transition metals in Ar/N-2
  • 2018
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 36:2
  • Tidskriftsartikel (refereegranskat)abstract
    • Reactive transition-metal (TM) nitride film growth employing bias-synchronized high power impulse magnetron sputtering (HiPIMS) requires a detailed knowledge of the time evolution of metal-and gas-ion fluxes incident at the substrate plane in order to precisely tune momentum transfer and, hence, provide the recoil density and energy necessary to eliminate film porosity at low deposition temperatures without introducing significant film stress. Here, the authors use energy- and time-dependent mass spectrometry to analyze the evolution of metal-and gas-ion fluxes at the substrate plane during reactive HiPIMS sputtering of groups IVb and VIb TM targets in Ar/N-2 atmospheres. The time-and energy-integrated metal/gas ion ratio NMe+/Ng+ incident at the substrate is significantly lower for group IVb TMs (ranging from 0.2 for Ti to 0.9 for Hf), due to high N-2 reactivity which results in severely reduced target sputtering rates and, hence, decreased rarefaction. In contrast, for less reactive group VIb metals, sputtering rates are similar to those in pure Ar as a result of significant gas heating and high NMe+/Ng+ ratios, ranging from 2.3 for Cr to 98.1 for W. In both sets of experiments, the peak target current density is maintained constant at 1 A/cm(2). Within each TM group, NMe+/N(g+)scales with increasing metal-ion mass. For the group-VIb elements, sputtered-atom Sigmund-Thompson energy distributions are preserved long after the HiPIMS pulse, in contradistinction to group-IVb TMs for which the energy distributions collapse into narrow thermalized peaks. For all TMs, the N+ flux dominates that of N-2(+) ions, as the molecular ions are collisionally dissociated at the target, and N+ exhibits ion energy distribution functions resembling those of metal ions. The latter result implies that both N+ and Me+ species originate from the target. High-energy Ar+ tails, assigned to ionized reflected-Ar neutrals, are observed with heavier TM targets. Published by the AVS.
  •  
80.
  • Greene, Joseph E (författare)
  • Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017
  • 2017
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 35:5
  • Forskningsöversikt (refereegranskat)abstract
    • Thin films, ubiquitous in todays world, have a documented history of more than 5000 years. However, thin-film growth by sputter deposition, which required the development of vacuum pumps and electrical power in the 1600s and the 1700s, is a much more recent phenomenon. First reported in the early 1800s, sputter deposition already dominated the optical-coating market by 1880. Preferential sputtering of alloys, sputtering of liquids, multitarget sputtering, and optical spectroscopy for process characterization were all described in the 1800s. Measurements of threshold energies and yields were carried out in the late 1800s, and yields in reasonable agreement with modern data were reported in the 1930s. Roll-to-roll sputter coating on flexible substrates was introduced in the mid-1930s, and the initial demonstration of sustained self-sputtering (i.e., sputtering without gas) was performed in 1970. The term magnetron dates to 1921, and the results of the first magnetron sputtering experiments were published in the late 1930s. The earliest descriptions of a parallel-plate magnetron were provided in a patent filed in 1962, rotatable magnetrons appeared in the early 1980s, and tunable "unbalanced" magnetron sputtering was developed in 1992. Two additional forms of magnetron sputtering evolved during the 1990s, both with the goal of efficiently ionizing sputter-ejected metal atoms: ionized-magnetron sputtering and high-power impulse magnetron sputtering, with the latter now being available in several variants. Radio frequency (rf) glow discharges were reported in 1891, with the initial results from rf deposition and etching experiments published in the 1930s. Modern capacitively-coupled rf sputtering systems were developed and modeled in the early 1960s, and a patent was filed in 1975 that led to pulsed-dc and mid-frequency-ac sputtering. The purposeful synthesis of metal-oxide films goes back to at least 1907, leading to early metal-oxide and nitride sputtering experiments in 1933, although the term "reactive sputtering" was not used in the literature until 1953. The effect of target oxidation on secondary-electron yields and sputtering rates was reported in 1940. The first kinetic models of reactive sputtering appeared in the 1960s; high-rate reactive sputtering, based on partial-pressure control, was developed in the early 1980s. While abundant experimental and theoretical evidence already existed in the late 1800s to the early 1900s demonstrating that sputtering is due to momentum transfer via ion-bombardment-induced near-surface collision cascades, the concept of sputtering resulting from local "impact evaporation" continued in the literature into the 1960s. Modern sputtering theory is based upon a linear-transport model published in 1969. No less than eight Nobel Laureates in Physics and Chemistry played major roles in the evolution of modern sputter deposition. (C) 2017 Author(s).
  •  
81.
  • Grossmann, Birgit, et al. (författare)
  • Tailoring age hardening of Ti1-xAlxN by Ta alloying
  • 2017
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 35:060604
  • Tidskriftsartikel (refereegranskat)abstract
    • The microstructure, mechanical properties, and thermal stability of arc evaporated Ti1-x-yAlxTayN hard coatings were systematically investigated by varying the Ta content in the range of 01-xAlxN solid solution, spinodal decomposition and wurtzite phase formation are shifted to higher temperatures. Consequently,the temperature range where Ta-alloyed coatings maintain their hardness is extended up to 1000°C.
  •  
82.
  • Gudmundsson, J. T., et al. (författare)
  • High power impulse magnetron sputtering discharge
  • 2012
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 30:3, s. 030801-
  • Forskningsöversikt (refereegranskat)abstract
    • The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron target in unipolar pulses at low duty cycle and low repetition frequency while keeping the average power about 2 orders of magnitude lower than the peak power. This results in a high plasma density, and high ionization fraction of the sputtered vapor, which allows better control of the film growth by controlling the energy and direction of the deposition species. This is a significant advantage over conventional dc magnetron sputtering where the sputtered vapor consists mainly of neutral species. The HiPIMS discharge is now an established ionized physical vapor deposition technique, which is easily scalable and has been successfully introduced into various industrial applications. The authors give an overview of the development of the HiPIMS discharge, and the underlying mechanisms that dictate the discharge properties. First, an introduction to the magnetron sputtering discharge and its various configurations and modifications is given. Then the development and properties of the high power pulsed power supply are discussed, followed by an overview of the measured plasma parameters in the HiPIMS discharge, the electron energy and density, the ion energy, ion flux and plasma composition, and a discussion on the deposition rate. Finally, some of the models that have been developed to gain understanding of the discharge processes are reviewed, including the phenomenological material pathway model, and the ionization region model.
  •  
83.
  • Hajihoseini, Hamidreza, et al. (författare)
  • Sideways deposition rate and ionized flux fraction in dc and high power impulse magnetron sputtering
  • 2020
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 38:3
  • Tidskriftsartikel (refereegranskat)abstract
    • The sideways (radial) deposition rate and ionized flux fraction in a high power impulse magnetron sputtering (HiPIMS) discharge are studied and compared to a dc magnetron sputtering (dcMS) discharge, while the magnetic field strength | B | and degree of balancing are varied. A significant deposition of the film forming material perpendicular to the target surface is observed for both sputter techniques. This sideways deposition decreases with increasing axial distance from the target surface. The sideways deposition rate is always the highest in dc operation, while it is lower for HiPIMS operation. The magnetic field strength has a strong influence on the sideways deposition rate in HiPIMS but not in dcMS. Furthermore, in HiPIMS operation, the radial ion deposition rate is always at least as large as the axial ion deposition rate and often around two times higher. Thus, there are a significantly higher number of ions traveling radially in the HiPIMS discharge. A comparison of the total radial as well as axial fluxes across the entire investigated plasma volume between the target and the substrate position allows for revised estimates of radial over axial flux fractions for different magnetic field configurations. It is here found that the relative radial flux of the film forming material is greater in dcMS compared to HiPIMS for almost all cases investigated. It is therefore concluded that the commonly reported reduction of the (axial) deposition rate in HiPIMS compared to dcMS does not seem to be linked with an increase in sideways material transport in HiPIMS.
  •  
84.
  • Hajihoseini, H., et al. (författare)
  • Target ion and neutral spread in high power impulse magnetron sputtering
  • 2023
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 41:1
  • Tidskriftsartikel (refereegranskat)abstract
    • In magnetron sputtering, only a fraction of the sputtered target material leaving the ionization region is directed toward the substrate. This fraction may be different for ions and neutrals of the target material as the neutrals and ions can exhibit a different spread as they travel from the target surface toward the substrate. This difference can be significant in high power impulse magnetron sputtering (HiPIMS) where a substantial fraction of the sputtered material is known to be ionized. Geometrical factors or transport parameters that account for the loss of produced film-forming species to the chamber walls are needed for experimental characterization and modeling of the magnetron sputtering discharge. Here, we experimentally determine transport parameters for ions and neutral atoms in a HiPIMS discharge with a titanium target for various magnet configurations. Transport parameters are determined to a typical substrate, with the same diameter (100 mm) as the cathode target, and located at a distance 70 mm from the target surface. As the magnet configuration and/or the discharge current are changed, the transport parameter for neutral atoms xi(tn) remains roughly the same, while transport parameters for ions xi(ti) vary greatly. Furthermore, the relative ion-to-neutral transport factors, xi(ti)/xi(tn), that describe the relative deposited fractions of target material ions and neutrals onto the substrate, are determined to be in the range from 0.4 to 1.1.
  •  
85.
  •  
86.
  • Head, Ashley R., et al. (författare)
  • In situ characterization of the deposition of anatase TiO2 on rutile TiO2(110)
  • 2018
  • Ingår i: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 36:2
  • Tidskriftsartikel (refereegranskat)abstract
    • Growing additional TiO2 thin films on TiO2 supstrates in ultrahigh vacuum (UHV)-compatible chambers have many applications for sample preparation, such as smoothing surface morphologies, templating, and covering impurities. However, there has been little study into how to control the morphology of TiO2 films deposited onto TiO2 supstrates, especially using atomic layer deposition (ALD) precursors. Here, the authors show the growth of a TiO2 film on a rutile TiO2(110) surface using titanium tetraisopropoxide (TTIP) and water as the precursors at pressures well below those used in common ALD reactors. X-ray absorption spectroscopy suggests that the relatively low sample temperature (175 °C) results in an anatase film despite the rutile template of the supstrate. Using ambient pressure x-ray photoelectron spectroscopy, the adsorption of TTIP was found to be self-limiting, even at room temperature. No molecular water was found to adsorb on the surface. The deposited thickness suggests that an alternate chemical vapor deposition growth mechanism may be dominating the growth process. This study highlights the possibility that metal oxide film deposition from molecular precursors is an option for sample preparations in common UHV-compatible chambers.
  •  
87.
  • Hedlund, Christer, 1964-, et al. (författare)
  • Angular dependence of the polysilicon etch rate during dry etching in SF6 and Cl-2
  • 1997
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 15:3, s. 686-691
  • Tidskriftsartikel (refereegranskat)abstract
    • The angular dependence of the etch rate in reactive ion etching (RIE) and inductively coupled plasma (ICP) systems for polysilicon etching with SF6" role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px; margin: 0px; position: relative;">SF6SF6 and Cl2" role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px; margin: 0px; position: relative;">Cl2Cl2 is determined using a recently developed direct measurement method. The latter utilizes specially patterned silicon groove structures consisting of 7–10 μm wide planar surfaces which form various angles with respect to the wafer normal. The structures are produced by highly anisotropic wet chemical etchingof Si through a gratinglike mask pattern aligned along specific crystallographic orientations of the wafer which results in the development of planar surfaces of various orientations. These surfaces are then coated with the materials to be studied—polysilicon in this case. The deposited polysilicon is then etched under a variety of conditions in a RIE and an ICP reactor and the etch rates determined by interferometric measurements. Since only standard Si wafers are used and the size of the pattern is only a few μm the method is fully IC production compatible, which means that one can measure the angular dependence of the etch rate directly in production etching systems. The results for RIE of polysilicon with SF6" role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px; margin: 0px; position: relative;">SF6SF6 show that the process becomes more isotropic with increasing pressure. The angular dependence of the RIE and ICP polysilicon etchrates in Cl2" role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px; margin: 0px; position: relative;">Cl2Cl2 atmosphere were found to vary with the substrate bias. Specifically low substrate bias resulted in an under cosine distribution whereas bias higher than 240–250 V led to over cosine distributions.
  •  
88.
  • Hedlund, C, et al. (författare)
  • Microloading effect in reactive etching
  • 1994
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - 0734-2101 .- 1520-8559. ; 12:4, s. 1962-1965
  • Tidskriftsartikel (refereegranskat)
  •  
89.
  • Hedlund, Christer, 1964-, et al. (författare)
  • Microloading effect in reactive ion etching
  • 1994
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 12:4, s. 1962-1965
  • Tidskriftsartikel (refereegranskat)abstract
    • The etch rate of silicon, during reactive ion etching (RIE), depends on the total exposed area. This is called the loading effect. However, local variations in the pattern density will, in a similar way, cause local variations in the etch rate. This effect is caused by a local depletion of reactive species and is called the microloading effect. Silicon wafers patterned with silicon dioxide have been etched in order to study the microloading effect. The pattern consists of a large exposed area and narrow lines at different distances from the edge of the large area. This arrangement makes it possible to study how the distance from the large area, which depletes the etchants, influences the etch rate. The influence of different processing parameters like, e.g., pressure, gas flow rate, and flow direction on the microloading effect have been investigated. It has been found that the microloading effect is small (<10%) compared to other pattern dependent nonuniformities. It is also shown that the nonuniformities caused by the microloading effect can be decreased by, e.g., decreasing the pressure or increasing the gas flow rate.
  •  
90.
  •  
91.
  • Hedlund, E., et al. (författare)
  • Heavy-ion induced desorption of a TiZrV coated vacuum chamber bombarded with 5 MeV/u Ar8+ beam at grazing incidence
  • 2009
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 27:1, s. 139-144
  • Tidskriftsartikel (refereegranskat)abstract
    • TiZrV nonevaporable getter (NEG) coated vacuum chambers is a new vacuum technology which is already used in many particle accelerators worldwide. This coating is also of interest for heavy-ion accelerator vacuum chambers. Heavy-ion desorption yields from an activated as well as a CO saturated NEG coated tube have been measured with 5 MeV/u Ar8+ beam. The sticking probability of the NEG film was obtained by using the partial pressure ratios on two sides of the NEG coated tube. These ratios were compared to results of modeling of the experimental setup with test particle Monte Carlo and angular coefficient methods. The partial pressures inside the saturated NEG coated tube bombarded with heavy ions were up to 20 times larger than those inside the activated one. However, the partial pressure of methane remained the same. The value of the total desorption yield from the activated NEG coated tube is 2600 molecules/ion. The desorption yields after saturation for CH4, H-2, and CO2 were found to be very close to the yields measured after the activation, while CO increased by up to a factor of 5. The total desorption yield for the saturated tube is up to 7000 molecules/ion. The large value of the desorption yield of the activated NEG coated tube, an order of magnitude higher than the desorption yield from a stainless steel tube at normal incident angle, could be explained by the grazing incident angle.
  •  
92.
  • Hellgren, N., et al. (författare)
  • Growth, structure, and mechanical properties of CNxHy films deposited by dc magnetron sputtering in N2/Ar/H2 discharges
  • 2000
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 18:5, s. 2349-2358
  • Tidskriftsartikel (refereegranskat)abstract
    • Reactive direct current magnetron sputtering was used to deposit the hydrogenated carbon nitride films in mixed nitrogen (N2)/argon (Ar)/ hydrogen (H2) discharges. Growth and structure evolution of films was found to be affected by chemical sputtering effects. The hydrogen were found to be bonded to nitrogen and hydrogen incorporation decreases the elasticity and hardness.
  •  
93.
  • Hellgren, Niklas, et al. (författare)
  • X-ray photoelectron spectroscopy analysis of TiBx (1.3 <= x <= 3.0) thin films
  • 2021
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 39:2
  • Tidskriftsartikel (refereegranskat)abstract
    • We report on a comprehensive analysis of titanium boride thin films by x-ray photoelectron spectroscopy (XPS). Films were grown by both direct current magnetron sputtering and high- power impulse magnetron sputtering from a compound TiB2 target in Ar discharge. By varying the deposition parameters, the film composition could be tuned over the wide range 1:3 &B/Ti &3:0, as determined by elastic recoil detection analysis and Rutherford backscattering spectrometry. By comparing spectra over this wide range of compositions, we can draw original conclusions about how to interpret XPS spectra of TiBx. By careful spectra deconvolution, the signals from Ti-Ti and B-B bonds can be resolved from those corresponding to stoichiometric TiB2. The intensities of the off-stoichiometric signals can be directly related to the B/Ti ratio of the films. Furthermore, we demonstrate a way to obtain consistent and quantum-mechanically accurate peak deconvolution of the whole Ti 2p envelope, including the plasmons, for both oxidized and sputter-cleaned samples. Due to preferential sputtering of Ti over B, the film B/Ti ratio is best determined without sputter etching of the sample surface. This allows accurate compositional determination, assuming that extensive levels of oxygen are not present in the sample. Fully dense films can be accurately quantified for at least a year after deposition, while underdense samples do not give reliable data if the O/Ti ratio on the unsputtered surface is *3:5. Titanium suboxides detected after sputter etching is further indicative of oxygen penetrating the sample, and quantification by XPS should not be trusted.
  •  
94.
  • Honnali, Sanath Kumar, et al. (författare)
  • Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings
  • 2023
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 41:4
  • Tidskriftsartikel (refereegranskat)abstract
    • A common design of sputtering systems is to integrate many magnetron sources in a tilted closed-field configuration, which can drastically affect the magnetic field in the chamber and thus plasma characteristics. To study this effect explicitly, multicomponent TiZrNbTaN coatings were deposited at room temperature using direct current magnetron sputtering (DCMS) and high-power impulse magnetron sputtering (HiPIMS) with different substrate biases. The coatings were characterized by x-ray diffraction, scanning electron microscopy, nano-indentation, and energy dispersive x-ray spectroscopy. Magnetic field simulations revealed ten times higher magnetic field strengths at the substrate in single-magnetron configuration when compared to the closed-field. As a result, the substrate ion current increased similar to 3 and 1.8 times for DCMS and HiPIMS, respectively. The film microstructure changed with the discharge type, in that DCMS coatings showed large sized columnar structures and HiPIMS coatings show globular nanosized structures with (111) orientation with a closed-field design. Coatings deposited from a single source showed dense columnar structures irrespective of the discharge type and developed (200) orientation only with HiPIMS. Coatings deposited with closed-field design by DCMS had low stress (0.8 to -1 GPa) and hardness in the range from 13 to 18 GPa. Use of HiPIMS resulted in higher stress (-3.6 to -4.3 GPa) and hardness (26-29 GPa). For coatings deposited with single source by DCMS, the stress (-0.15 to -3.7 GPa) and hardness were higher (18-26 GPa) than for coatings grown in the closed-field design. With HiPIMS and single source, the stress was in the range of -2.3 to -4.2 GPa with a similar to 6% drop in the hardness (24-27 GPa).
  •  
95.
  • Hsu, Chih-Wei, et al. (författare)
  • Homogeneous high In content InxGa1-x N films by supercycle atomic layer deposition
  • 2022
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 40:6
  • Tidskriftsartikel (övrigt vetenskapligt/konstnärligt)abstract
    • InxGa1-x N is a strategically important material for electronic devices given its tunable bandgap, modulated by the In/Ga ratio. However, current applications are hindered by defects caused by strain relaxation and phase separation in the material. Here, we demonstrate growth of homogeneous InxGa1-x N films with 0.3 < x < 0.8 up to similar to 30 nm using atomic layer deposition (ALD) with a supercycle approach, switching between InN and GaN deposition. The composition is uniform along and across the films, without signs of In segregation. The InxGa1-x N films show higher In-content than the value predicted by the supercycle model. A more pronounced reduction of GPC(InN) than GPC(GaN) during the growth processes of InN and GaN bilayers is concluded based on our analysis. The intermixing between InN and GaN bilayers is suggested to explain the enhanced overall In-content. Our results show the advantage of ALD to prepare high-quality InxGa1-x N films, particularly with high In-content, which is difficult to achieve with other growth methods.
  •  
96.
  • Huang, Jing-Jia, et al. (författare)
  • Conformal and superconformal chemical vapor deposition of silicon carbide coatings
  • 2022
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 40:5
  • Tidskriftsartikel (refereegranskat)abstract
    • The approaches to conformal and superconformal deposition developed by Abelson and Girolami for a low-temperature, low-pressure chemical vapor deposition (CVD) setting relevant for electronic materials in micrometer or submicrometer scale vias and trenches, are tested here in a high-temperature, moderate pressure CVD setting relevant for hard coatings in millimeter-scale trenches. Conformal and superconformal deposition of polycrystalline silicon carbide (SiC) can be accomplished at deposition temperatures between 950 and 1000 degrees C with precursor partial pressure higher than 20 Pa and an optional minor addition of HCl as a growth inhibitor. The conformal deposition at low temperatures is ascribed to slower kinetics of the precursor consumption along the trench depth, whereas the impact of high precursor partial pressure and addition of inhibitor is attributable to surface site blocking. With the slower kinetics and the site blocking from precursor saturation leading the growth to nearly conformal and the possibly preferential inhibition effect near the opening than at the depth, a superconformal SiC coating with 2.6 times higher thickness at the bottom compared to the top of a 1 mm trench was achieved. Published under an exclusive license by the AVS.
  •  
97.
  • Huang, Jing-Jia, et al. (författare)
  • Superconformal silicon carbide coatings via precursor pulsed chemical vapor deposition
  • 2023
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 41:3
  • Tidskriftsartikel (refereegranskat)abstract
    • In this work, silicon carbide (SiC) coatings were successfully grown by pulsed chemical vapor deposition (CVD). The precursors silicon tetrachloride (SiCl4) and ethylene (C2H4) were not supplied in a continuous flow but were pulsed alternately into the growth chamber with H-2 as a carrier and a purge gas. A typical pulsed CVD cycle was SiCl4 pulse-H-2 purge-C2H4 pulse-H-2 purge. This led to growth of superconformal SiC coatings, which could not be obtained under similar process conditions using a constant flow CVD process. We propose a two-step framework for SiC growth via pulsed CVD. During the SiCl4 pulse, a layer of Si is deposited. In the following C2H4 pulse, this Si layer is carburized, and SiC is formed. The high chlorine surface coverage after the SiCl4 pulse is believed to enable superconformal growth via a growth inhibition effect.
  •  
98.
  • Hultman, L., et al. (författare)
  • Formation of polyhedral voids at surface cusps during growth of epitaxial TiN/NbN superlattice and alloy films
  • 1992
  • Ingår i: Journal of Vacuum Science and Technology A. - : American Vacuum Society. - 0734-2101. ; 10:4, s. 1618-1624
  • Tidskriftsartikel (refereegranskat)abstract
    • Epitaxial TiN/NbN(001) superiattice thin films with periods A between 0 (alloy) and 9.6 nm have been grown by ultrahigh vacuum reactive magnetron sputter deposition on MgO(OOl) substrates in mixed Ar/N2 discharges. Cross-sectional transmission electron microscopy was used for characterizing layer and defect structure. Coherency strain relaxation close to the film/substrate interface resulted in nonplanar growth with surface cusps and the creation of apparent column boundaries at which TiN and NbN layers curved towards the substrate, but across which the basic lattice was ordered. Also, a fraction of the boundaries were associated with threading defects along the growth direction. The column boundaries and threading defects were decorated by voids that exhibited an orthorhombohedral shape, were elongated in the growth direction, and typically had flat surfaces on {100} planes. The origin of voids is suggested to be through self-shadowing at surface cusps in combination with limited adatom mobility. The voids subsequently attained equilibrium shape as the result of surface and bulk diffusion. The void density varied withλ and the void length in the growth direction was generally an integer number of periods, indicating that the void formation was influenced by the superiattice layers. The formation of limited voids is suggested to be characteristic of thin film growth close to the epitaxial temperature.
  •  
99.
  • Hägglund, Carl, 1975-, et al. (författare)
  • Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition
  • 2016
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 34:2
  • Tidskriftsartikel (refereegranskat)abstract
    • A broad and expanding range of materials can be produced by atomic layer deposition at relatively low temperatures, including both oxides and metals. For many applications of interest, however, it is desirable to grow more tailored and complex materials such as semiconductors with a certain doping, mixed oxides, and metallic alloys. How well such mixed materials can be accomplished with ALD requires knowledge of the conditions under which the resulting films will be mixed, solid solutions, or laminated. The growth and lamination of zinc oxide and tin oxide is studied here by means of the extremely surface sensitive technique of low energy ion scattering, combined with bulk composition and thickness determination, and X-ray diffraction. At the low temperatures used for deposition (150 °C) there is little evidence for atomic scale mixing even with the smallest possible bilayer period, and instead a morphology with small ZnO inclusions in a SnOx matrix is deduced. Post-annealing of such laminates above 400 °C however produces a stable surface phase with a 30% increased density. From the surface stoichiometry, this is likely the inverted spinel of zinc stannate, Zn2SnO4. Annealing to 800 °C results in films containing crystalline Zn2SnO4, or multilayered films of crystalline ZnO, Zn2SnO4 and SnO2 phases, depending on the bilayer period.
  •  
100.
  • Hänninen, Tuomas, et al. (författare)
  • Silicon oxynitride films deposited by reactive high power impulse magnetron sputtering using nitrous oxide as a single-source precursor
  • 2015
  • Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 33:5, s. 05E121-
  • Tidskriftsartikel (refereegranskat)abstract
    • Silicon oxynitride thin films were synthesized by reactive high power impulse magnetron sputtering of silicon in argon/nitrous oxide plasmas. Nitrous oxide was employed as a single-source precursor supplying oxygen and nitrogen for the film growth. The films were characterized by elastic recoil detection analysis, x-ray photoelectron spectroscopy, x-ray diffraction, x-ray reflectivity, scanning electron microscopy, and spectroscopic ellipsometry. Results show that the films are silicon rich, amorphous, and exhibit a random chemical bonding structure. The optical properties with the refractive index and the extinction coefficient correlate with the film elemental composition, showing decreasing values with increasing film oxygen and nitrogen content. The total percentage of oxygen and nitrogen in the films is controlled by adjusting the gas flow ratio in the deposition processes. Furthermore, it is shown that the film oxygen-to-nitrogen ratio can be tailored by the high power impulse magnetron sputtering-specific parameters pulse frequency and energy per pulse. (C) 2015 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.
  •  
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