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- Carlborg, Carl Fredrik, 1981-, et al.
(författare)
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RELIABLE BATCH MANUFACTURING OF MINIATURIZED VERTICAL VIAS IN SOFT POLYMER REPLICA MOLDING
- 2007
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Ingår i: 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2007). ; , s. 527-529
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Konferensbidrag (refereegranskat)abstract
- We introduce and have successfully tested an uncomplicated polydimethylsiloxane (PDMS) compatible method for batch manufacturing vertical microfluidic interconnects via a surface inhibition of cationic photopolymerization. The yield of the maskless method is 100%. Moreover, the method enhances bond strength with subsequently laminated polymer layers.
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