| 1. |
- Karlsson, J. Mikael, 1982-, et al.
(författare)
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Fabrication and transfer of fragile 3D PDMS microstructures
- 2012
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Ingår i: Journal of Micromechanics and Microengineering. - : IOP Publishing. - 0960-1317 .- 1361-6439. ; 22:8, s. 1-9
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Tidskriftsartikel (refereegranskat)abstract
- We present a method for PDMS microfabrication of fragile membranes and 3D fluidic networks, using a surface modified water-dissolvable release material, poly(vinyl alcohol), as a tool for handling, transfer and release of fragile polymer microstructures. The method is well suited for the fabrication of complex multilayer microfluidic devices, here shown for a PDMS device with a thin gas permeable membrane and closely spaced holes for vertical interlayer connections fabricated in a single layer. To the authors knowledge, this constitutes the most advanced PDMS fabrication method for the combination of thin, fragile structures and 3D fluidics networks, and hence a considerable step in the direction of making PDMS fabrication of complex microfluidic devices a routine endeavour.
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| 2. |
- Karlsson, J. Mikael, 1982-, et al.
(författare)
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Low-stress transfer bonding using floatation
- 2012
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Ingår i: Journal of Micromechanics and Microengineering. - : Institute of Physics Publishing (IOPP). - 0960-1317 .- 1361-6439. ; 22:7, s. 075005-075011
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Tidskriftsartikel (refereegranskat)abstract
- A novel method for transferring thin, large-area polymer layers from a mould and its subsequent bonding to a destination substrate is presented here. Buoyancy is used for transfer via floatation to allow the release of internal stress in the polymer and to avoid induced strain. Additionally, floatation leads to wrinkle-free contact between the polymer layer and its destination substrate, an important feature for the transfer of large-area polymer sheets. Poly(vinyl alcohol) is used as a release film on the mould, from which the device polymer layer is released using ultrasonication. The polymer layer floats from the mould to a destination surface, to which it automatically aligns. Here, the method is demonstrated by the successful manufacturing of a 4 '' sized, triple microfluidic layer PDMS stack on a silicon wafer, containing a total of 48 large-area, fragile membranes, each with a thickness of 50 mu m.
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| 3. |
- Saharil, Farizah, et al.
(författare)
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Biocompatible "click" wafer bonding for microfluidic devices
- 2012
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Ingår i: Lab on a Chip. - : RSC Publishing. - 1473-0197 .- 1473-0189. ; 12:17, s. 3032-3035
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Tidskriftsartikel (refereegranskat)abstract
- We introduce a novel dry wafer bonding concept designed for permanent attachment of micromolded polymer structures to surface functionalized silicon substrates. The method, designed for simultaneous fabrication of many lab-on-chip devices, utilizes a chemically reactive polymer microfluidic structure, which rapidly bonds to a functionalized substrate via "click" chemistry reactions. The microfluidic structure consists of an off-stoichiometry thiol-ene (OSTE) polymer with a very high density of surface bound thiol groups and the substrate is a silicon wafer that has been functionalized with common bio-linker molecules. We demonstrate here void free, and low temperature (<37 degrees C) bonding of a batch of OSTE microfluidic layers to a silane functionalized silicon wafer.
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