| 1. |
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| 2. |
- Abasahl, B., et al.
(författare)
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Towards Low-Power Reconfigurable Photonic ICs Based on MEMS Technology
- 2018
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Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- With the progress and industrialization of photonic integrated circuits (PIC) in the past few decades, there is a strong urge towards design and prototyping in a fast, low-cost and reliable manner. In electronics, this demand is met through field programmable gate arrays (FPGA). In the Horizon 2020 MORPHIC (MEMS-based zerO-power Reconfigurable Photonic ICs) project, we are developing a reconfigurable PIC platform to address this demand in the field of photonics and to facilitate the path from idea towards realization for PIC designers and manufacturers.
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| 3. |
- Agustsson, J. S., et al.
(författare)
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Electrical resistivity and morphology of ultra thin Pt films grown by dc magnetron sputtering on SiO(2)
- 2008
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Ingår i: Journal of Physics Conference Series. - : IOP Science. - 1742-6596.
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Konferensbidrag (refereegranskat)abstract
- Ultra thin platinum films were grown by dc magnetron sputtering on thermally oxidized Si (100) substrates. The electrical resistance of the films was monitored in-situ during growth. The coalescence thickness was determined for various growth temperatures and found to increase from 1.3 nm for films grown at room temperature to 1.8 nm for films grown at 250 degrees C, while a continuous film was formed at a thickness of 3.9 nm at room temperature and 3.5 nm at 250 degrees C. The electrical resistivity increases with increased growth temperature, as well as the morphological grain size, and the surface roughness, measured with a scanning tunneling microscope (STM).
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| 4. |
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| 5. |
- Alvarez, Jesus, et al.
(författare)
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A Real Time Immunoassay in Alumina Membranes
- 2014
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Ingår i: SENSORS, 2014 IEEE. - : IEEE conference proceedings. ; , s. 1760-1763
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Konferensbidrag (refereegranskat)abstract
- To date, photonic biosensing with porous membranes has produced slow responses and long sensing times, due to the narrow (less than 100 nm) closed end pores of the membranes used. Recently, polarimetry was used to demonstrate analyte flow through, and real time biosensing in, free-standing porous alumina membranes. Here, we demonstrate how an improved functionalization technology, has for the first time enabled a real-time immunoassay within a porous membrane with a total assay time below one hour. With the new approach, we show a noise floor for individual biosensing measurements of 3.7 ng/ml (25 pM), and a bulk refractive index detection limit of 5×10-6 RIU, with a standard deviation of less than 5%. The membranes, with their 200 nm pore diameter enabling targeted delivering of analytes to bioreceptors immobilized on the pore walls, therefore provide a route towards rapid and low cost real-time opto-fluidic biosensors for small sample volumes.
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| 6. |
- Álvarez, Jesús, et al.
(författare)
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Real time optical immunosensing with flow-through porous alumina membranes
- 2014
-
Ingår i: Sensors and actuators. B, Chemical. - : Elsevier. - 0925-4005 .- 1873-3077. ; 202, s. 834-839
-
Tidskriftsartikel (refereegranskat)abstract
- Through the presentation of analytical data from bioassay experiments, measured by polarimetry, we demonstrate for the first time a real time immunoassay within a free standing macroporous alumina membrane. The 200 nm nominal pore diameter of the membrane enables flow-through, thereby providing an ideal fluidic platform for the targeted delivery of analytes to bioreceptors immobilized on the pore walls, enabling fast sensing response times and the use of small sample volumes (<100 μL). For the immunoassay, the pore walls were first coated with the functional copolymer, copoly(DMA-NAS) using a novel coupling process, before immobilization of the allergen protein, β-lactoglobulin, by spotting. The immuno-assay then proceeded with the binding of the primary and secondary antibody cognates, rabbit anti-β-lactoglobulin and anti-rabbit IgG respectively. Through the use of streptavidin coated quantum dots as refractive index signal enhancers, a noise floor for individual measurements of 3.7 ng/mL (25 pM) was obtained, with an overall statistical, or formal assay LOD of 33.7 ng/mL (225 pM), for total assay time below 1 h.
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| 7. |
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| 8. |
- Barrios, Carlos A., et al.
(författare)
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Slot-waveguide biochemical sensor (vol 32, pg 2080, 2007)
- 2008
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Ingår i: Optics Letters. - : OPTICAL SOC AMER. - 0146-9592 .- 1539-4794. ; 33:21, s. 2554-2555
-
Tidskriftsartikel (refereegranskat)abstract
- The group index, instead of the effective index, is used to analyze the performance of a Si(3)N(4)-SiO(2) slot-waveguide microring refractive index sensor [Opt. Lett. 32, 3080 (2007)]. Assuming that the slot is fully filled with liquid, excellent agreement is found between experimental results and calculations.
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| 9. |
- Barrios, Carlos, et al.
(författare)
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Integrated Si3N4/SiO2 Slot-Waveguide Microresonators
- 2007
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Konferensbidrag (refereegranskat)abstract
- We demonstrate slot-waveguide microring resonators and Fabry-Perot microcavities on Si3N4/SiO2. Characterization indicates guiding and confinement in the waveguide nanometric-size low-index slot region at O-band (1260-1370nm) wavelengths. We measured propagation losses <20 dB/cm.
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| 10. |
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| 11. |
- Bleiker, Simon J., et al.
(författare)
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Device with a waveguide supported on a substrate and method for its fabrication
- 2020
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Patent (populärvet., debatt m.m.)abstract
- ABSTRACT A device (1) and a method for fabricating such a device is described. The device (1) comprises a device layer (4), a substrate (2) defining a substrate plane (3). A device layer plane (5) is defined on the side of the device layer (4) facing the substrate (2). The device also comprises a waveguide (7) for guiding an electromagnetic wave. The waveguide (7) is supported on the substrate (2) via a support structure (6) extending from the substrate (2) to the device layer (4). The ratio of the largest distance (D1), perpendicular to the substrate plane (3), between a free surface of the waveguide (7) facing the substrate and any solid material to the height (h) of the waveguide (7) is more than 6, i.e. D1/h \textgreater 6. The ratio of the distance (D2), perpendicular to the substrate plane (3), between the device layer plane (5) and the substrate plane (3) to the height (h) of the waveguide (7) is more than 6, i.e. D2/h \textgreater 6.
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| 12. |
- Bogaerts, W., et al.
(författare)
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Low-Power Electro-Optic Actuators for Large-Scale Programmable Photonic Circuits
- 2021
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Ingår i: 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings. - : Institute of Electrical and Electronics Engineers Inc..
-
Konferensbidrag (refereegranskat)abstract
- Photonic integrated circuits are becoming increasingly more complex, especially with the emergence of programmable photonic circuits. These require many tunable photonic elements, such as electro-optic phase shifters and tunable couplers. We will discuss our progress in compact, low-power silicon photonics actuators based on heaters, liquid crystal and MEMS that can be scaled up to large circuits.
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| 13. |
- Bogaerts, Wim, et al.
(författare)
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MORPHIC : Programmable Photonic Circuits enabled by Silicon Photonic MEMS
- 2020
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Ingår i: Proceedings Volume 11285 SPIE OPTO - 1-6 February 2020 Silicon Photonics XV. - : SPIE-Intl Soc Optical Eng.
-
Konferensbidrag (övrigt vetenskapligt/konstnärligt)abstract
- In the European project MORPHIC we develop a platform for programmable silicon photonic circuits enabled by waveguide-integrated micro-electro-mechanical systems (MEMS). MEMS can add compact, and low-power phase shifters and couplers to an established silicon photonics platform with high-speed modulators and detectors. This MEMS technology is used for a new class of programmable photonic circuits, that can be reconfigured using electronics and software, consisting of large interconnected meshes of phase shifters and couplers. MORPHIC is also developing the packaging and driver electronics interfacing schemes for such large circuits, creating a supply chain for rapid prototyping new photonic chip concepts. These will be demonstrated in different applications, such as switching, beamforming and microwave photonics.
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| 14. |
- Bogaerts, Wim, et al.
(författare)
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Programmable Photonic Circuits powered by Silicon Photonic MEMS Technology
- 2022
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Ingår i: Photonic Networks and Devices, Networks 2022. - : Optica Publishing Group (formerly OSA).
-
Konferensbidrag (refereegranskat)abstract
- Programmable photonic chips allow flexible reconfiguration of on-chip optical connections, controlled through electronics and software. We will present the recent progress of such complex photonic circuits powered by silicon photonic MEMS actuators.
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| 15. |
- Bogaerts, W., et al.
(författare)
-
Programmable photonic circuits using silicon photonic MEMS
- 2021
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Ingår i: Optics InfoBase Conference Papers. - : The Optical Society.
-
Konferensbidrag (refereegranskat)abstract
- We present a silicon photonics technology extended with low-power MEMS scalable to large circuits. This enables us to make photonic waveguide meshes that can be reconfigured using electronics and software.
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| 16. |
- Bogaerts, Wim, et al.
(författare)
-
Programmable silicon photonic circuits powered by MEMS
- 2022
-
Ingår i: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE-Intl Soc Optical Eng.
-
Konferensbidrag (refereegranskat)abstract
- We present our work to extend silicon photonics with MEMS actuators to enable low-power, large scale programmable photonic circuits. For this, we start from the existing iSiPP50G silicon photonics platform of IMEC, where we add free-standing movable waveguides using a few post-processing steps. This allows us to implement phase shifters and tunable couplers using electrostatically actuated MEMS, while at the same time maintaining all the original functionality of the silicon photonics platform. The MEMS devices are protected using a wafer-level sealing approach and interfaced with custom multi-channel driver and readout electronics.
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| 17. |
- Bogaerts, Wim, et al.
(författare)
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Scaling programmable silicon photonics circuits
- 2023
-
Ingår i: Silicon Photonics XVIII. - : SPIE-Intl Soc Optical Eng.
-
Konferensbidrag (refereegranskat)abstract
- We give an overview the progress of our work in silicon photonic programmable circuits, covering the techn stack from the photonic chip over the driver electronics, packaging technologies all the way to the sof layers. On the photonic side, we show our recent results in large-scale silicon photonic circuits with diff tuning technologies, including heaters, MEMS and liquid crystals, and their respective electronic driving sch We look into the scaling potential of these different technologies as the number of tunable elements in a ci increases. Finally, we elaborate on the software routines for routing and filter synthesis to enable the pho programmer.
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| 18. |
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| 19. |
- Dubois, Valentin J., et al.
(författare)
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A single-lithography SOI rib waveguide sensing circuit with apodized low back-reflection surface grating fiber coupling
- 2012
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Ingår i: SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS III. - : SPIE - International Society for Optical Engineering. - 9780819491237 ; , s. 84311-84311
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Konferensbidrag (refereegranskat)abstract
- We present a single-lithography Mach-Zehnder interferometer sensor circuit, with integrated low back-reflection input and output grating couplers. The low back-reflection is accomplished by a duty cycle apodization optimized for coupling light between single-mode silica fibers and the nanometric silicon-on-insulator (SOI) rib-waveguides. We discuss the design, fabrication, and characterization of the circuit. The apodization profile of the gratings is algorithmically generated using eigenmode expansion based simulations and the integrated waveguides, splitters, and combiners are designed using finite element simulations. The maximum simulated coupling efficiencies of the gratings are 70% and the multimode interference splitters and combiners have a footprint of only 19.2ￜ4.5 ￜm2. The devices are fabricated on an SOI wafer with a 220 nmdevice layer and 2 ￜm buried oxide, by a single electron beam lithography and plasma etching. We characterize the devices in the wavelength range from 1460-1580 nm and show a grating pass-band ripple of only 0.06 dB and grating coupling efficiency of 40% at 1530 nm. The integrated Mach-Zehnder interferometer has an extinction ratio of -18 dB at 1530 nm and between -13 and -19 dB over the whole 1460-1580 nm range.
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| 20. |
- Edinger, Pierre, et al.
(författare)
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A Bistable Silicon Photonic Mems Phase Switch For Nonvolatile Photonic Circuits
- 2022
-
Konferensbidrag (refereegranskat)abstract
- Silicon photonic circuits are rapidly growing in complexity and spreading to new applications. However, programmable circuits consume much power and require active electrical interfaces. For the first time, we demonstrate a nonvolatile photonic MEMS π-phase switch using dual comb-drive actuation and adhesion forces, implemented in a silicon photonics foundry. Both nonvolatile states are low-loss, display low dispersion, could be cycled through over 100 times, and have retention times over 12 hours. We believe that the demonstrated nonvolatility combined with excellent optical performance can enable a new generation of programmable photonic chips that do not consume any electrical power once (re)configured.
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| 21. |
- Edinger, Pierre, et al.
(författare)
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A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits
- 2023
-
Ingår i: Integrated Photonics Research, Silicon and Nanophotonics in Proceedings Advanced Photonics Congress 2023 - Part of Advanced Photonics Congress 2023. - : Optica Publishing Group.
-
Konferensbidrag (refereegranskat)abstract
- Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.
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| 22. |
- Edinger, Pierre, et al.
(författare)
-
A vacuum-sealed silicon photonic MEMS tunable ring resonator with independent control over coupling and phase
-
Annan publikation (övrigt vetenskapligt/konstnärligt)abstract
- Ring resonators are a vital element for designing filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption and good optical performance are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of coupling and round-trip phase using low-power microelectromechanical (MEMS) actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable long-term operation with low damping. On resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4V and a peak drive amplitude as low as 20mV.
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| 23. |
- Edinger, Pierre, et al.
(författare)
-
Add-drop silicon ring resonator with low-power MEMS tuning of phase and coupling
- 2022
-
Ingår i: 2022 Conference on Lasers and Electro-Optics, CLEO 2022. - : Institute of Electrical and Electronics Engineers Inc..
-
Konferensbidrag (refereegranskat)abstract
- Applications of silicon photonics range from sensing to microwave processing. However, low-power active filters with long FSRs are lacking. We demonstrate an add-drop ring filter with 4 nm FSR and nW-level MEMS tuning of phase and coupling.
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| 24. |
- Edinger, Pierre, et al.
(författare)
-
An Integrated Platform for Cavity Optomechanics with Vacuum-Sealed Silicon Photonic MEMS
- 2023
-
Ingår i: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. - : Institute of Electrical and Electronics Engineers Inc.. ; , s. 425-428
-
Konferensbidrag (refereegranskat)abstract
- Silicon photonics is an excellent platform for integrated cavity optomechanics due to silicon's high light confinement and favorable mechanical properties. However, optomechanical devices require a vacuum environment to inhibit damping due to air.We present an integrated platform for cavity optomechanics using thermo-compression bonding of silicon caps to provide on-chip vacuum sealing. We demonstrate optomechanical coupling in a vacuum-sealed ring resonator implemented on the platform, either by modulation of the laser power or by using an electrostatic phase shifter in the ring.By enabling optomechanics on a standard platform, we aim to make the technology available to a wider user base.
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| 25. |
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| 26. |
- Edinger, Pierre, et al.
(författare)
-
Low-loss MEMS phase shifter for large scale reconfigurable silicon photonics
- 2019
-
Ingår i: 2019 IEEE 32nd international conference on micro electro mechanical systems (MEMS). - : Institute of Electrical and Electronics Engineers (IEEE). - 9781728116105 ; , s. 919-921
-
Konferensbidrag (refereegranskat)abstract
- We experimentally demonstrate a silicon MEMS phase shifter achieving more than π phase shift with sub-dB insertion loss (IL). The phase is tuned by reducing the gap between a static suspended waveguide and a free silicon beam, via comb-drive actuation. Our device reaches 1.2π phase shift at only 20 V, with only 0.3 dB insertion loss – an order of magnitude improvement over previously reported MEMS devices. The device has a small footprint of 50×70 µm2 and its power consumption is 5 orders of magnitude lower than that of traditional thermal phase shifters. Our new phase shifter is a fundamental building block of the next-generation large scale reconfigurable photonic circuits which will find applications in datacenter interconnects, artificial intelligence (AI), and quantum computing.
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| 27. |
- Edinger, Pierre, et al.
(författare)
-
Reducing Actuation Nonlinearity of MEMS Phase Shifters for Reconfigurable Photonic Circuits
- 2019
-
Ingår i: 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO). - : IEEE. - 9781943580576
-
Konferensbidrag (refereegranskat)abstract
- The low power consumption of MEMS actuators enables large-scale reconfigurable photonic circuits. However, insertion loss and actuation linearity need improvement. By simulations and experiments, we analyze the dominating design parameters affecting linearity and suggest improvements.
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| 28. |
- Edinger, Pierre
(författare)
-
Silicon photonic MEMS building blocks for low-power programmable circuits
- 2022
-
Doktorsavhandling (övrigt vetenskapligt/konstnärligt)abstract
- Silicon photonics, or the confinement and control of light in integrated silicon waveguides, has rapidly grown from research labs to high-end chips for telecommunications. With the associated improvements in waveguide performance, the technology is promising for a wide range of new applications, from computing to sensing. However, current chip implementations of such applications are limited in scale. The available actuators used to control the circuits do not have the performance needed as building blocks for large circuits requiring thousands of actuators.Today’s silicon photonic circuits rely mainly on heaters and the thermo-optic effect for actuation. It enables the monolithic integration of reconfigurable building blocks in silicon photonic foundries with low optical losses and relatively short optical lengths. However, such heater-based building blocks consume over 1mW per device. Opto-electronic actuators are also available in silicon photonic foundries for high-speed modulation but are lossy and long.Micromechanical actuators for silicon photonics could provide the missing technology for scaling photonic circuits. Silicon is a material with excellent mechanical properties, and MEMS actuators can therefore be designed on the same layers used for waveguides. Electrostatic MEMS actuators consume very low power (<1nW static leakage per device), can achieve optical losses on par with state-of-the-art thermo-optic devices, within shorter optical lengths, and have response times in the μs range. However, such actuators require the partial suspension of silicon structures for movement, which is not currently available in silicon photonic foundries and presents additional challenges for commercial packaging.This thesis aims to bring large-scale photonic circuits closer to reality by integrating low-power and scalable silicon photonic MEMSactuators in a silicon photonics foundry platform. MEMS-based building blocks with scalable optical performance were developed and included in photonic circuits. The devices and circuits were implemented on a silicon photonics foundry platform (IMEC’s iSiPP50G)with a few foundry-compatible post-processing steps. Finally, a solution for wafer-level sealing of the MEMS actuators was developed, compatible with subsequent packaging and enhancing the mechanical performance of the devices.
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| 29. |
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| 30. |
- Edinger, Pierre, et al.
(författare)
-
Silicon photonic MEMS phase shifter with µs time constant built on a foundry platform
- 2021
-
Ingår i: Optics InfoBase Conference Papers. - : The Optical Society.
-
Konferensbidrag (refereegranskat)abstract
- MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2π phase shifter with a 1.54 µs time constant and 0.5 dB insertion loss in IMEC's iSiPP50G platform.
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| 31. |
- Edinger, Pierre, et al.
(författare)
-
Silicon photonic microelectromechanical phase shifters for scalable programmable photonics
- 2021
-
Ingår i: Optics Letters. - : OSA. - 0146-9592 .- 1539-4794. ; 46:22, s. 5671-5674
-
Tidskriftsartikel (refereegranskat)abstract
- Programmable photonic integrated circuits are emerging as an attractive platform for applications such as quantum information processing and artificial neural networks. However, current programmable circuits are limited in scalability by the lack of low-power and low-loss phase shifters in commercial foundries. Here, we demonstrate a compact phase shifter with low-power photonic microelectromechanical system (MEMS) actuation on a silicon photonics foundry platform (IMEC’s iSiPP50G). The device attains (2.9π±π) phase shift at 1550 nm, with an insertion loss of (0.33\textminus0.10$+$0.15)dB, a Vπ of (10.7\textminus1.4$+$2.2)V, and an Lπ of (17.2\textminus4.3$+$8.8)µm. We also measured an actuation bandwidth f\textminus3dB of 1.03 MHz in air. We believe that our demonstration of a low-loss and low-power photonic MEMS phase shifter implemented in silicon photonics foundry compatible technology lifts a main roadblock toward the scale-up of programmable photonic integrated circuits.
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| 32. |
- Edinger, Pierre, et al.
(författare)
-
Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase
- 2023
-
Ingår i: Optics Express. - : Optica Publishing Group. - 1094-4087. ; 31:4, s. 6540-6551
-
Tidskriftsartikel (refereegranskat)abstract
- Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of round-trip phase and coupling using low-power microelectromechanical (MEMS) actuation. At a wavelength of 1540 nm and for a maximum voltage of 40 V, the phase shifters provide a resonance wavelength tuning of 0.15 nm, while the tunable couplers can tune the optical resonance extinction ratio at the through port from 0 to 30 dB. The optical resonance displays a passive quality factor of 29 000, which can be increased to almost 50 000 with actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable and long-term protection from the environment. We cycled the mechanical actuators for more than 4 x 109 cycles at 100 kHz, and did not observe degradation in their response curves. On mechanical resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4 V and a peak drive amplitude as low as 20 mV.
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| 33. |
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| 34. |
- Enrico, Alessandro, et al.
(författare)
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Ultrafast and Resist-Free Nanopatterning of 2D Materials by Femtosecond Laser Irradiation
- 2023
-
Ingår i: ACS Nano. - : American Chemical Society (ACS). - 1936-0851 .- 1936-086X. ; 17:9, s. 8041-8052
-
Tidskriftsartikel (refereegranskat)abstract
- The performance of two-dimensional (2D) materials is promising for electronic, photonic, and sensing devices since they possess large surface-to-volume ratios, high mechanical strength, and broadband light sensitivity. While significant advances have been made in synthesizing and transferring 2D materials onto different substrates, there is still the need for scalable patterning of 2D materials with nanoscale precision. Conventional lithography methods require protective layers such as resist or metals that can contaminate or degrade the 2D materials and deteriorate the final device performance. Current resist-free patterning methods are limited in throughput and typically require custom-made equipment. To address these limitations, we demonstrate the noncontact and resist-free patterning of platinum diselenide (PtSe2), molybdenum disulfide (MoS2), and graphene layers with nanoscale precision at high processing speed while preserving the integrity of the surrounding material. We use a commercial, off-the-shelf two-photon 3D printer to directly write patterns in the 2D materials with features down to 100 nm at a maximum writing speed of 50 mm/s. We successfully remove a continuous film of 2D material from a 200 μm × 200 μm substrate area in less than 3 s. Since two-photon 3D printers are becoming increasingly available in research laboratories and industrial facilities, we expect this method to enable fast prototyping of devices based on 2D materials across various research areas.
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| 35. |
- Errando-Herranz, Carlos, et al.
(författare)
-
Biocompatibility of OSTE polymers studied by cell growth experiments
- 2013
-
Ingår i: Proceedings of the 17th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (microTAS). - Freiburg, Germany.
-
Konferensbidrag (refereegranskat)abstract
- The recently introduced OSTE polymer technology has shown very useful features for microfluidics for lab-on-a-chip applications. However, no data has yet been published on cell viability on OSTE. In this work, we study the biocompatibility of three OSTE formulations by cell growth experiments. Moreover, we investigate the effect of varying thiol excess on cell viability on OSTE surfaces. The results show poor cell viability on one OSTE formulation, and viability comparable with polystyrene on a second formulation with thiol excess below 60%. In the third formulation, we observe cell proliferation. These results are promising for cell-based assays in OSTE microfluidic devices.
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| 36. |
- Errando-Herranz, Carlos, et al.
(författare)
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Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE
- 2013
-
Ingår i: Optics Express. - : Optical Society of America. - 1094-4087. ; 21:18, s. 21293-21298
-
Tidskriftsartikel (refereegranskat)abstract
- We present a novel integration method for packaging silicon photonic sensors with polymer microfluidics, designed to be suitable for wafer-level production methods. The method addresses the previously unmet manufacturing challenges of matching the microfluidic footprint area to that of the photonics, and of robust bonding of microfluidic layers to biofunctionalized surfaces. We demonstrate the fabrication, in a single step, of a microfluidic layer in the recently introduced OSTE polymer, and the subsequent unassisted dry bonding of the microfluidic layer to a grating coupled silicon photonic ring resonator sensor chip. The microfluidic layer features photopatterned through holes (vias) for optical fiber probing and fluid connections, as well as molded microchannels and tube connectors, and is manufactured and subsequently bonded to a silicon sensor chip in less than 10 minutes. Combining this new microfluidic packaging method with photonic waveguide surface gratings for light coupling allows matching the size scale of microfluidics to that of current silicon photonic biosensors. To demonstrate the new method, we performed successful refractive index measurements of liquid ethanol and methanol samples, using the fabricated device. The minimum required sample volume for refractive index measurement is below one nanoliter.
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| 37. |
- Errando-Herranz, Carlos, et al.
(författare)
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Integration Of Polymer Microfluidic Channels, Vias, And Connectors With Silicon Photonic Sensors By One-Step Combined Photopatterning And Molding Of OSTE
- 2013
-
Ingår i: Proceedings of the 2013 17th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers). - : IEEE conference proceedings. ; , s. 1613-1616
-
Konferensbidrag (refereegranskat)abstract
- We demonstrate a method for the fast and simple packaging of silicon sensors into a microfluidic package consisting of the recently introduced {OSTE} polymer. The microfluidic layer is first microstructured and thereafter dry-bonded to a silicon photonic sensor, in a process compatible with wafer-level production, and with the entire packaging process lasting only 10 minutes. The fluidic layer combines molded microchannels and fluidic (Luer) connectors with photopatterned through-holes (vias) for optical fiber probing and fluid connections. All the features are fabricated in a single photocuring step. We report measurements with an integrated silicon photonic {Mach-Zehnder} interferometer refractive index sensor packaged by these means.
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| 38. |
- Errando-Herranz, Carlos, et al.
(författare)
-
Integration of polymer microfluidics with silicon photonic biosensors by one-step combined photopatterning and molding of OSTE
- 2013
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Konferensbidrag (refereegranskat)abstract
- We demonstrate a method for the fast and simple packaging of silicon sensors into a microfluidic package consisting of the recently introduced {OSTE} polymer. The microfluidic layer is first microstructured and thereafter dry-bonded to a silicon photonic sensor, in a process compatible with wafer-level production, and with the entire packaging process lasting only 10 minutes. The fluidic layer combines molded microchannels and fluidic (Luer) connectors with photopatterned through-holes (vias) for optical fiber probing and fluid connections. All the features are fabricated in a single photocuring step. We report measurements with an integrated silicon photonic {Mach-Zehnder} interferometer refractive index sensor packaged by these means.
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| 39. |
- Errando-Herranz, Carlos, et al.
(författare)
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Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter
- 2015
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Ingår i: Optics Letters. - : Optical Society of America. - 0146-9592 .- 1539-4794. ; 40:15, s. 3556-3559
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Tidskriftsartikel (refereegranskat)abstract
- We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-€“drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-€“drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -ˆ’62 €€‰pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-€“drop filters.
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| 40. |
- Errando-Herranz, Carlos, 1989-, et al.
(författare)
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Low-power optical beam steering by microelectromechanical waveguide gratings
- 2019
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Ingår i: Optics Letters. - : OPTICAL SOC AMER. - 0146-9592 .- 1539-4794. ; 44:4, s. 855-858
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Tidskriftsartikel (refereegranskat)abstract
- Optical beam steering is key for optical communications, laser mapping (lidar), and medical imaging. For these applications, integrated photonics is an enabling technology that can provide miniaturized, lighter, lower-cost, and more power-efficient systems. However, common integrated photonic devices are too power demanding. Here, we experimentally demonstrate, for the first time, to the best of our knowledge, beam steering by microelectromechanical (MEMS) actuation of a suspended silicon photonic waveguide grating. Our device shows up to 5.6 degrees beam steering with 20 V actuation and power consumption below the mu W level, i.e., more than five orders of magnitude lower power consumption than previous thermo-optic tuning methods. The novel combination of MEMS with integrated photonics presented in this work lays ground for the next generation of power-efficient optical beam steering systems.
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| 41. |
- Errando-Herranz, Carlos, 1989-, et al.
(författare)
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MEMS for Photonic Integrated Circuits
- 2020
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Ingår i: IEEE Journal of Selected Topics in Quantum Electronics. - : IEEE Press. - 1077-260X .- 1558-4542. ; 26:2, s. 1-16
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Tidskriftsartikel (refereegranskat)abstract
- The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.
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| 42. |
- Errando-Herranz, Carlos, 1989-, et al.
(författare)
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New dynamic silicon photonic components enabled by MEMS technology
- 2018
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Ingår i: Proceedings Volume 10537, Silicon Photonics XIII. - : SPIE - International Society for Optical Engineering. - 9781510615595
-
Konferensbidrag (refereegranskat)abstract
- Silicon photonics is the study and application of integrated optical systems which use silicon as an optical medium, usually by confining light in optical waveguides etched into the surface of silicon-on-insulator (SOI) wafers. The term microelectromechanical systems (MEMS) refers to the technology of mechanics on the microscale actuated by electrostatic actuators. Due to the low power requirements of electrostatic actuation, MEMS components are very power efficient, making them well suited for dense integration and mobile operation. MEMS components are conventionally also implemented in silicon, and MEMS sensors such as accelerometers, gyros, and microphones are now standard in every smartphone. By combining these two successful technologies, new active photonic components with extremely low power consumption can be made. We discuss our recent experimental work on tunable filters, tunable fiber-to-chip couplers, and dynamic waveguide dispersion tuning, enabled by the marriage of silicon MEMS and silicon photonics.
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| 43. |
- Errando-Herranz, Carlos, et al.
(författare)
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Photonic ring resonators for biosensing
- 2016
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Ingår i: Nanodevices for Photonics and Electronics. - : Pan Stanford Publishing. - 9789814613750 - 9789814613743 ; , s. 385-424
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Bokkapitel (refereegranskat)
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| 44. |
- Errando-Herranz, Carlos, 1989-, et al.
(författare)
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Suspended polarization beam splitter on silicon-on-insulator
- 2018
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Ingår i: Optics Express. - : Optical Society of America. - 1094-4087. ; 26:3, s. 2675-2681
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Tidskriftsartikel (refereegranskat)abstract
- Polarization handling in suspended silicon photonics has the potential to enable new applications in fields such as optomechanics, photonic microelectromechanical systems, and mid-infrared photonics. In this work, we experimentally demonstrate a suspended polarization beam splitter on a silicon-on-insulator waveguide platform, based on an asymmetric directional coupler. Our device presents polarization extinction ratios above 10 and 15 dB, and insertion losses below 5 and 1 dB, for TM and TE polarized input, respectively, across a 40 nm wavelength range at 1550 nm, with a device length below 8 µm. These results make our suspended polarization beam splitter a promising building block for future systems based on polarization diversity suspended photonics.
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| 45. |
- Fan, Xuge, et al.
(författare)
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Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors
- 2023
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Ingår i: ACS Applied Nano Materials. - : American Chemical Society (ACS). - 2574-0970. ; 7:1, s. 102-109
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Tidskriftsartikel (refereegranskat)abstract
- The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.
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| 46. |
- Fischer, Andreas C., et al.
(författare)
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Layer-by-layer 3D printing of Si micro- and nanostructures by Si deposition, ion implantation and selective Si etching
- 2012
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Ingår i: 12th IEEE Conference on Nanotechnology (IEEE-NANO), 2012. - : IEEE conference proceedings. - 9781467321983 ; , s. 1-4
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Konferensbidrag (refereegranskat)abstract
- In this paper we report a method for layer-by-layer printing of three-dimensional (3D) silicon (Si) micro- and nanostructures. This fabrication method is based on a sequence of alternating steps of chemical vapor deposition of Si and local implantation of gallium (Ga+) ions by focused ion beam (FIB) writing. The defined 3D structures are formed in a final step by selectively wet etching the non-implanted Si in potassium hydroxide (KOH). We demonstrate the viability of the method by fabricating 2 and 3-layer 3D Si structures, including suspended beams and patterned lines with dimensions on the nm-scale.
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| 47. |
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| 48. |
- Gylfason, Kristinn B., 1978-, et al.
(författare)
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A packaged optical slot-waveguide ring resonator sensor array for multiplex assays in labs-on-chip
- 2009
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Ingår i: Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences. - : Chemical and Biological Microsystems Society. - 9780979806421 ; , s. 2004-2006
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Konferensbidrag (refereegranskat)abstract
- We present the design, fabrication, and characterization of a packaged array of individually addressable slot-waveguide ring resonator sensors in a compact cartridge for sensitive, label-free, multiplex assays. The novel use of a dual surfaceenergy adhesive film enables simple generic packaging method for multiple sensors in a single cartridge. The use of optical slot-waveguides, and drift compensation by on-chip light splitting to reference sensors, gives the best refractive-index limit of detection reported for planar ring resonator sensors.
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| 49. |
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| 50. |
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