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- Karlsson, Peter R., 1963, et al.
(författare)
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A new method of determining the effective channel width and its dependence on the gate voltage
- 1996
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Ingår i: Proceedings of the IEEE International Conference on Microelectronic Test Structures ICMTS. - 0780327837 ; 1996:25-28 March 1996
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Konferensbidrag (refereegranskat)abstract
- A novel and simple method for the extraction of the effective channel width and its dependence on the gate voltage is presented. Both synthetic and measured data have been used to evaluate the new method which is superior to previous methods in not assuming any particular width or gate voltage dependencies of the series resistance.
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- Karlsson, Peter R., 1963, et al.
(författare)
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An efficient method for determining threshold voltage, series resistance and effective geometry of MOS transistors
- 1996
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Ingår i: IEEE Transactions on Semiconductor Manufacturing. - 0894-6507. ; 9:2, s. 215 - 222
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Tidskriftsartikel (refereegranskat)abstract
- An accurate and robust method of extracting the threshold voltage, the series resistance and the effective geometry of MOS transistors is presented. The method is based on efficient nonlinear optimization using an iterative linear regression procedure which usually converges in less than four rounds. Thereby extracted parameters are obtained from analytical expressions for the solutions to a linear system of equations whereby time consuming numerical differentiations are avoided. MOSFET parameters are explicitly identified as parameters of an underlying widely used device model that is a good approximation for operation in the linear region. The method is particularly suitable for process characterization and can be used on as few as twelve data points (three data points from each of four different size transistors). By connecting external resistors in series with the transistors, we show that the extracted values of the parameters are independent of the series resistance.
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- Karlsson, Peter R., 1963, et al.
(författare)
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Test chip and data considerations for MOS parameter extraction
- 1997
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Ingår i: Proceedings of the IEEE International Conference on Microelectronic Test Structures ICMTS. - 0780332431 ; 1997:17-20 March 1997
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Konferensbidrag (refereegranskat)abstract
- This paper presents an investigation of principles for test chip design and data point selection for MOS parameter extraction methods using a low number of data points. Variations in extracted parameter values for different combinations and numbers of data points are studied experimentally. The influences on the standard deviations of V/sub T/, /spl beta/, /spl theta/, R/sub S/, /spl Delta/W and /spl Delta/L of different data point selections and device combinations are studied using synthetic data with multiplicative noise.
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