Process development for improved soft X-ray zone plates

• We demonstrate two nanofabrication methods which improve the diffraction efficiency of high-resolution soft X-ray nickel zone plates. First, pulse electroplating is shown to result in uniform diffraction efficiency over the entire zone-plate area. A resulting enhancement of the total efficiency of 20% compared to conventional DC plating was measured. Second, we demonstrate that a high-resolution cold development process can be combined with efficiency-enhancing dry etching into an underlying germanium film. We present 16 nm half-pitch gratings composed of 50 nm nickel on top of 50 nm germanium.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Annan teknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Other Engineering and Technologies (hsv//eng)

Nyckelord

Zone plate

Electroplating

Diffraction efficiency

microscopy

Engineering physics

Teknisk fysik

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)