| 1. |
- Bogaerts, W., et al.
(författare)
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Low-Power Electro-Optic Actuators for Large-Scale Programmable Photonic Circuits
- 2021
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Ingår i: 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings. - : Institute of Electrical and Electronics Engineers Inc..
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Konferensbidrag (refereegranskat)abstract
- Photonic integrated circuits are becoming increasingly more complex, especially with the emergence of programmable photonic circuits. These require many tunable photonic elements, such as electro-optic phase shifters and tunable couplers. We will discuss our progress in compact, low-power silicon photonics actuators based on heaters, liquid crystal and MEMS that can be scaled up to large circuits.
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| 2. |
- Bogaerts, W., et al.
(författare)
-
Programmable photonic circuits using silicon photonic MEMS
- 2021
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Ingår i: Optics InfoBase Conference Papers. - : The Optical Society.
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Konferensbidrag (refereegranskat)abstract
- We present a silicon photonics technology extended with low-power MEMS scalable to large circuits. This enables us to make photonic waveguide meshes that can be reconfigured using electronics and software.
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| 3. |
- Khan, U., et al.
(författare)
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Large scale programmable photonic circuits using silicon photonic MEMS
- 2022
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Ingår i: 2022 Conference on Lasers and Electro-Optics, CLEO 2022. - : Institute of Electrical and Electronics Engineers Inc..
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Konferensbidrag (refereegranskat)abstract
- We demonstrate low-power and non-volatile MEMS actuators on an industrially established silicon photonics platform. The compact electrostatically actuated phase shifters and tunable couplers enable large-scale programmable photonic integrated circuits.
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| 4. |
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| 5. |
- Edinger, Pierre, et al.
(författare)
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Silicon photonic MEMS phase shifter with µs time constant built on a foundry platform
- 2021
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Ingår i: Optics InfoBase Conference Papers. - : The Optical Society.
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Konferensbidrag (refereegranskat)abstract
- MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2π phase shifter with a 1.54 µs time constant and 0.5 dB insertion loss in IMEC's iSiPP50G platform.
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| 6. |
- Errando-Herranz, Carlos, 1989-, et al.
(författare)
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MEMS for Photonic Integrated Circuits
- 2020
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Ingår i: IEEE Journal of Selected Topics in Quantum Electronics. - : IEEE Press. - 1077-260X .- 1558-4542. ; 26:2, s. 1-16
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Tidskriftsartikel (refereegranskat)abstract
- The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.
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| 7. |
- Quack, N., et al.
(författare)
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Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics
- 2021
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Ingår i: 2021 IEEE Photonics Conference, IPC 2021 - Proceedings. - : Institute of Electrical and Electronics Engineers (IEEE).
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Konferensbidrag (refereegranskat)abstract
- Recent advances in integration of Nano-Opto-Electromechanical Systems in Silicon Photonics enable fundamental photonic operations such as switching, phase shifting or power equalization on-chip. The unique combination of high optical efficiency, low electric power consumption and compact footprint, provides outstanding opportunities in scalability to large-scale photonic integrated circuits.
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