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- Vyas, Agin, 1992, et al.
(författare)
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Enhanced Electrode Deposition for On-Chip Integrated Micro-Supercapacitors by Controlled Surface Roughening
- 2020
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Ingår i: ACS Omega. - : American Chemical Society (ACS). - 2470-1343. ; 5:10, s. 5219-5228
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Tidskriftsartikel (refereegranskat)abstract
- On-chip micro-supercapacitors (MSCs), integrated with energy harvesters, hold substantial promise for developing self-powered wireless sensor systems. However, MSCs have conventionally been manufactured through techniques incompatible with semiconductor fabrication technology, the most significant bottleneck being the electrode deposition technique. Utilization of spin-coating for electrode deposition has shown potential to deliver several complementary metal-oxide-semiconductor (CMOS)-compatible MSCs on a silicon substrate. Yet, their limited electrochemical performance and yield over the substrate have remained challenges obstructing their subsequent integration. We report a facile surface roughening technique for improving the wafer yield and the electrochemical performance of CMOS-compatible MSCs, specifically for reduced graphene oxide as an electrode material. A 4 nm iron layer is deposited and annealed on the wafer substrate to increase the roughness of the surface. In comparison to standard nonroughened MSCs, the increase in surface roughness leads to a 78% increased electrode thickness, 21% improvement in mass retention, 57% improvement in the uniformity of the spin-coated electrodes, and a high yield of 87% working devices on a 2″ silicon substrate. Furthermore, these improvements directly translate to higher capacitive performance with enhanced rate capability, energy, and power density. This technique brings us one step closer to fully integrable CMOS-compatible MSCs in self-powered systems for on-chip wireless sensor electronics. ©
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| 2. |
- Vyas, Agin, 1992, et al.
(författare)
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Impact of electrode geometry and thickness on planar on-chip microsupercapacitors
- 2020
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Ingår i: RSC Advances. - : Royal Society of Chemistry (RSC). - 2046-2069. ; 10:52, s. 31435-31441
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Tidskriftsartikel (refereegranskat)abstract
- We report an assessment of the influence of both finger geometry and vertically-oriented carbon nanofiber lengths in planar micro-supercapacitors. Increasing the finger number leads to an up-scaling in areal power densities, which increases with scan rate. Growing the nanofibers longer, however, does not lead to a proportional growth in capacitance, proposedly related to limited ion penetration of the electrode.
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| 3. |
- Vyas, Agin, 1992, et al.
(författare)
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Towards Integrated Flexible Energy Harvester and Supercapacitor for Self-powered Wearable Sensors
- 2020
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Ingår i: 2019 19TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS).
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Konferensbidrag (refereegranskat)abstract
- We present the first results of a flexible energy harvester and a foldable supercapacitor to power wearable and flexible sensors. The flexible energy harvester is fabricated by using 38 mu m piezoelectric polyvinylidene difluoride (PVDF) sandwiched between carbon electrodes. Both the design and process excel in simplicity and cost-effectiveness. The flexible harvester demonstrates a power output of 2.6 mu W cm(-3) at a resonant frequency of 50 Hz with a 3dB bandwidth of about 11 Hz, which is higher than devices previously reported and similar to a commercial PZT harvester film of same size. A flexible energy storage supercapacitor (GP-SC) was fabricated using a graphite/VACNTs (vertically aligned carbon nanotubes) material as electrodes. A prototype GP-SCs has an areal capacitance of about 1.2 mF cm(-2). Finally, an integrated scheme is proposed for future work.
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