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- Yantchev, Ventsislav, 1976-, et al.
(författare)
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Thin AlN film resonators utilizing the lowest order symmetric lamb mode: Further developments
- 2007
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Konferensbidrag (refereegranskat)abstract
- Thin film plate acoustic wave resonators utilizing thelowest order symmetric Lamb wave (S0) propagating in highlytextured 2μm thick Aluminum Nitride (AlN) membranes weresuccessfully demonstrated for the first time [1]. Further theutilization of fast lateral modes in thin films has recently beingtargeted independently by other groups as well [2,3]. Theunperturbed S0 mode in thin film AlN has an acoustic wavevelocity in excess of 10 000 m/s with a weak dispersion andsufficient coupling. Q factors of around 1800 were demonstratedfor 890 MHz one-port synchronous resonators operating in thevicinity of the upper stopband edge [1]. In this work anexperimental study on the resonators’ performance vs variety ofdesign parameters is performed. Devices operating in thevicinity of the stopband center offering a Q of up to 3000 at afrequency of around 875 MHz are demonstrated. Further,micromachined 2-port longitudinally coupled thin filmresonators utilizing the S0 mode are demonstrated for the firsttime.
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