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Phase evolution of ...
Phase evolution of radio frequency magnetron sputtered Cr-rich (Cr,Zr)(2)O-3 coatings studied by in situ synchrotron X-ray diffraction during annealing in air or vacuum
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- Landälv, Ludvig, 1982- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Sandvik Coromant AB, Sweden
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- Rogström, Lina, 1983- (author)
- Linköpings universitet,Nanostrukturerade material,Tekniska fakulteten
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- Lu, Jun, 1962- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Ostach, Daniel (author)
- Helmholtz Zentrum Geesthacht, Germany
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- Eriksson, Fredrik, 1975- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Junaid, Muhammad, 1975- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Ghafoor, Naureen, 1975- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Ekström, Erik, 1989- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Hsiao, Ching-Lien, 1975- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Leiste, Harald (author)
- Karlsruhe Inst Technol, Germany
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- Ahlgren, Mats (author)
- Sandvik Coromant AB, Sweden
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- Gothelid, Emmanuelle (author)
- Sandvik Coromant AB, Sweden
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- Alling, Björn, 1980- (author)
- Linköpings universitet,Teoretisk Fysik,Tekniska fakulteten
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- Hultman, Lars, Professor, 1960- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Stuber, Michael (author)
- Karlsruhe Inst Technol, Germany
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- Schell, Norbert (author)
- Helmholtz Zentrum Geesthacht, Germany
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- Birch, Jens, 1960- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Eklund, Per, Docent, 1977- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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(creator_code:org_t)
- 2019-11-28
- 2019
- English.
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In: Journal of Materials Research. - : CAMBRIDGE UNIV PRESS. - 0884-2914 .- 2044-5326. ; 34:22, s. 3735-3746
- Related links:
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https://liu.diva-por... (primary) (Raw object)
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https://link.springe...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- The phase evolution of reactive radio frequency (RF) magnetron sputtered Cr0.28Zr0.10O0.61 coatings has been studied by in situ synchrotron X-ray diffraction during annealing under air atmosphere and vacuum. The annealing in vacuum shows t-ZrO2 formation starting at similar to 750-800 degrees C, followed by decomposition of the alpha-Cr2O3 structure in conjunction with bcc-Cr formation, starting at similar to 950 degrees C. The resulting coating after annealing to 1140 degrees C is a mixture of t-ZrO2, m-ZrO2, and bcc-Cr. The air-annealed sample shows t-ZrO2 formation starting at similar to 750 degrees C. The resulting coating after annealing to 975 degrees C is a mixture of t-ZrO2 and alpha-Cr2O3 (with dissolved Zr). The microstructure coarsened slightly during annealing, but the mechanical properties are maintained, with no detectable bcc-Cr formation. A larger t-ZrO2 fraction compared with alpha-Cr2O3 is observed in the vacuum-annealed coating compared with the air-annealed coating at 975 degrees C. The results indicate that the studied pseudo-binary oxide is more stable in air atmosphere than in vacuum.
Subject headings
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
Keyword
- physical vapor deposition (PVD); annealing; oxide
Publication and Content Type
- ref (subject category)
- art (subject category)
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- By the author/editor
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Landälv, Ludvig, ...
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Rogström, Lina, ...
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Lu, Jun, 1962-
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Ostach, Daniel
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Eriksson, Fredri ...
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Junaid, Muhammad ...
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Ghafoor, Naureen ...
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Ekström, Erik, 1 ...
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Hsiao, Ching-Lie ...
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Leiste, Harald
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Ahlgren, Mats
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Gothelid, Emmanu ...
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Alling, Björn, 1 ...
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Hultman, Lars, P ...
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Stuber, Michael
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Schell, Norbert
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Birch, Jens, 196 ...
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Eklund, Per, Doc ...
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- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Chemical Science ...
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and Materials Chemis ...
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Journal of Mater ...
- By the university
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Linköping University