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Träfflista för sökning "WFRF:(Maximov Ivan) ;pers:(Balaz Martina)"

Sökning: WFRF:(Maximov Ivan) > Balaz Martina

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1.
  • Graczyk, Mariusz, et al. (författare)
  • Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect
  • 2012
  • Ingår i: Microelectronic Engineering. - : Elsevier BV. - 1873-5568 .- 0167-9317. ; 97, s. 173-176
  • Tidskriftsartikel (refereegranskat)abstract
    • The spatial control of molecular motor function, using nanostructured surfaces, is of great interest for the development of commercial devices for diagnostics and high-throughput drug screening with molecular motors as targets. In the present study we have fabricated 100-300 nm wide nanochannels, completely subsurfaced on fused silica chips, with the aim to interface them with a microfluidic system. Such a system will allow for changes in the chemical environment surrounding molecular motors, with minimal influence on their directional motion. This will be achieved by changing the chemical environment in a perpendicular direction to the motor motion and allowing the chemical substances to diffuse in and out of the nanochannels via a small slit (5-10 nm) on the top of the nanochannels. To create this slit, and to control its width, we here demonstrate the use of a self-closing effect based on the volume increase (2.27 times) during oxidation of silicon. The details of the fabrication steps (EBL, RIE and oxidation) are discussed. (C) 2012 Elsevier B.V. All rights reserved.
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2.
  • Graczyk, Mariusz, et al. (författare)
  • Optimization of a self-closing effect to produce nanochannels with top slits in fused silica
  • 2012
  • Ingår i: Journal of Vacuum Science and Technology B. - : American Vacuum Society. - 1520-8567. ; 30:6
  • Tidskriftsartikel (refereegranskat)abstract
    • The authors report on the fabrication of subsurfaced 100-600 nm wide nanochannels in fused silica with top slit openings in the size range of 5-10 nm. Such nanochannels can be used in combination with a nanofluidics system to guide molecular motors and quickly switch the chemical environment inside the nanochannels through diffusion via the top slits. To realize nanochannel top slits in this size range, the authors here demonstrate the use of a self-closing effect based on the volume expansion of a thin Si layer during oxidation. A high contrast electron beam lithography exposure step in conjunction with dry etching of SiO2 by reactive ion etching (RIE) and Si by inductively coupled plasma-RIE followed by wet etching of a fused silica substrate is used to create the initial slit before oxidation. The details of nanochannel fabrication steps are described and discussed. (C) 2012 American Vacuum Society. [http://dx.doi.org/10.1116/1.4766317]
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  • Resultat 1-2 av 2
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tidskriftsartikel (2)
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refereegranskat (2)
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Graczyk, Mariusz (2)
Maximov, Ivan (2)
Balaz, Martina (2)Ta bort avgränsningen
Linke, Heiner (2)
Kvennefors, Anders (1)
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Lunds universitet (2)
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Engelska (2)
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Naturvetenskap (2)
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2012 (2)

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