Tyck till om SwePub Sök
här!
Search: hsv:(NATURVETENSKAP) hsv:(Fysik) hsv:(Den kondenserade materiens fysik)
> Swedish University of Agricultural Sciences
> Palisaitis Justinas >
Hexacoordinated Gal...
Hexacoordinated Gallium(III) Triazenide Precursor for Epitaxial Gallium Nitride by Atomic Layer Deposition
-
- Rouf, Polla (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
-
- Samii, Rouzbeh (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
-
- Rönnby, Karl (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
-
show more...
-
- Bakhit, Babak (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
-
- Buttera, Sydney C. (author)
- Carleton Univ, Canada
-
- Martinovic, Ivan (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
-
- Ojamäe, Lars (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
-
- Chih-Wei, Chih-Wei (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
-
- Palisaitis, Justinas (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
-
- Kessler, Vadim (author)
- Swedish University of Agricultural Sciences,Sveriges lantbruksuniversitet,Institutionen för Molekylära vetenskaper,Department of Molecular Sciences,Swedish Univ Agr Sci, Sweden
-
- Pedersen, Henrik (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
-
- O´brien, Nathan (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
-
show less...
-
(creator_code:org_t)
-
- 2021-04-22
- 2021
- English.
-
In: Chemistry of Materials. - : AMER CHEMICAL SOC. - 0897-4756 .- 1520-5002. ; 33:9, s. 3266-3275
- Related links:
-
https://pubs.acs.org...
-
show more...
-
https://pub.epsilon.... (primary) (Raw object) (free)
-
https://urn.kb.se/re...
-
https://doi.org/10.1...
-
https://res.slu.se/i...
-
show less...
Abstract
Subject headings
Close
- Gallium nitride (GaN) is the main component of modern-day high electron mobility transistors due to its favorable electronic properties. As electronic devices become smaller with more complex surface architecture, the ability to deposit high-quality GaN films at low temperatures is required. Herein, we report a new highly volatile Ga(III) triazenide precursor and demonstrate its ability to deposit high-quality epitaxial GaN by atomic layer deposition (ALD). This new Ga(III) triazenide, the first hexacoordinated Ga-N bonded precursor used in a vapor deposition process, was easily synthesized and purified by either sublimation or recrystallisation. Thermogravimetric analysis showed single-step volatilization with an onset temperature of 155 degrees C and negligible residual mass. Three temperature intervals with self-limiting growth were observed when depositing GaN films. The GaN films grown in the second growth interval at 350 degrees C were epitaxial on 4H-SiC without an AlN seed layer and found to have a near stoichiometric Ga/N ratio with very low levels of impurities. In addition, electron microstructure analysis showed a smooth film surface and a sharp interface between the substrate and film. The band gap of these films was 3.41 eV with the Fermi level at 1.90 eV, showing that the GaN films were unintentionally n-type-doped. This new triazenide precursor enables ALD of GaN for semiconductor applications and provides a new Ga(III) precursor for future deposition processes.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
- NATURVETENSKAP -- Kemi -- Materialkemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Materials Chemistry (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
Find in a library
To the university's database
- By the author/editor
-
Rouf, Polla
-
Samii, Rouzbeh
-
Rönnby, Karl
-
Bakhit, Babak
-
Buttera, Sydney ...
-
Martinovic, Ivan
-
show more...
-
Ojamäe, Lars
-
Chih-Wei, Chih-W ...
-
Palisaitis, Just ...
-
Kessler, Vadim
-
Pedersen, Henrik
-
O´brien, Nathan
-
show less...
- About the subject
-
- NATURAL SCIENCES
-
NATURAL SCIENCES
-
and Physical Science ...
-
and Condensed Matter ...
-
- NATURAL SCIENCES
-
NATURAL SCIENCES
-
and Chemical Science ...
-
and Materials Chemis ...
- Articles in the publication
-
Chemistry of Mat ...
- By the university
-
Linköping University
-
Swedish University of Agricultural Sciences