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Determination of in...
Determination of interface roughness by using a spectroscopic total-integrated-scatter instrument
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- Rönnow, Daniel (författare)
- Department of Technology, Uppsala University, Uppsala, Sweden
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- Bergkvist, M. (författare)
- Department of Technology, Uppsala University, Uppsala, Sweden
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- Roos, A. (författare)
- Department of Technology, Uppsala University, Uppsala, Sweden
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- Ribbing, C.-G. (författare)
- Department of Technology, Uppsala University, Uppsala, Sweden
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(creator_code:org_t)
- 1993
- 1993
- Engelska.
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Ingår i: Applied Optics. - 1559-128X .- 2155-3165. ; 32:19, s. 3448-3451
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- A spectroscopic total-integrated-scatter instrument has been constructed. It uses a Coblentz sphere for the collection of the scattered light and a lamp with a monochromator as a light source. It can be used to measure diffuse reflectance as well as transmittance. The instrument has been used to measure diffuse reflectance of thermally and chemical-vapor-deposition oxidized silicon wafers. Comparisons are made with measurements by using a spectrophotometer with an integrating sphere. The data have been interpreted with a parameterized model for light scattering from a double layer, to obtain rms surface roughness values for the two interfaces of the oxide film.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Instruments; Light scattering; Light sources; Oxide films; Reflection; Silicon oxides; Spheres; Surface roughness; Vapors; Chemical vapor deposition; Optics; Spectroscopy
- Diffuse reflectance; Double layers; Integrating spheres; Interface roughness; Oxidized silicon wafers; Parameterized model; Scattered light
- Interfaces (materials); Roughness measurement
- Chemical-vapor deposition oxidized silicon wafers; Interface roughness determination; Optical double layer; Spectroscopic total-integrated scatter instrument
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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