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Effect of hole shap...
Effect of hole shapes on the reliability of deeply-etched InP-based photonic crystal devices
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- Shahid, Naeem (författare)
- KTH,Halvledarmaterial, HMA
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- Naureen, Shagufta (författare)
- KTH,Halvledarmaterial, HMA
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- Anand, Srinivasan (författare)
- KTH,Halvledarmaterial, HMA
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(creator_code:org_t)
- 2012-05-21
- 2012
- Engelska.
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Ingår i: Physica Status Solidi. C, Current topics in solid state physics. - : Wiley. - 1610-1634 .- 1610-1642. ; 9:7, s. 1670-1673
- Relaterad länk:
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https://urn.kb.se/re...
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visa fler...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- We present systematic evaluation of the optical transmission characteristics of a set of photonic crystal waveguides (PhCWs) fabricated by two schemes. An optimized hole-reshaping process to obtain cylindrical holes was applied in one scheme and a comparison is made with as-etched PhCWs. The spectral characteristics of the transmission mini- stopband (MSB) in identical waveguides show that the reliability, in terms of spectral position and shape, of fabricated PhCWs using the hole reshaping process is significantly improved in comparison to the as-etched waveguides. The obtained MSB characteristics are attractive for coarse WDM filtering and wavelength selective mirrors.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Dry etching
- Mass transport
- Material reflow
- Mini-stopband
- Photonics crystals
- Reliability
- Waveguide
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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