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High aspect ratio e...
High aspect ratio etching and characterization of 2D-photonic crystals in InP/InGaAsP/InP heterostructures
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- Anand, Srinivasan (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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- Qiu, Min (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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- Mulot, Mikael (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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- Swillo, Marcin (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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- Jaskorzynska, Bozena (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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- Karlsson, Anders (författare)
- KTH,Mikroelektronik och informationsteknik, IMIT
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(creator_code:org_t)
- SPIE - International Society for Optical Engineering, 2004
- 2004
- Engelska.
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Ingår i: Photonics. - : SPIE - International Society for Optical Engineering. - 0819451703 ; , s. 78-89
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- We report on the fabrication and characterization of 2D photonic crystals (PhCs) in InP/InGaAsP/InP heterostructures. It is demonstrated that Ar/C12 based chemically assisted ion beam etching (CAIBE) is a very promising method to obtain high aspect ratio etching of PhCs in the InP-based materials. With this process, it is possible to obtain PC-holes as deep as 3 microns even for feature (PhC-hole) sizes as small as 200-250 nm. The optical characteristics of the fabricated PhC-based elements/devices such as line-defect waveguides, in-plane resonant cavities and drop-filter based on contra-directional coupling will be reported. The devices were measured using end-fire coupling and the obtained results were simulated using the 2D finite difference time domain (FDTD) method including an effective loss-approximation. The etched PhC-waveguides show low transmission losses, less than 1 dB/100 mum. A quality factor of 400 for a 6 micron long cavity with 6-hole mirrors is obtained. Finally, drop-functionality in a PhC-based filter using contra-directional coupling is demonstrated.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- photonic crystals
- photonic crystal waveguides
- optical cavities
- optical filters
- drop filters
- InP
- chemically assisted ion beam etching
- reactive ion beam etching
Publikations- och innehållstyp
- ref (ämneskategori)
- kon (ämneskategori)
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