Fully Depleted UTB and Trigate N-Channel MOSFETs Featuring Low-Temperature PtSi Schottky-Barrier Contacts With Dopant Segregation

• Schottky-barrier source/drain (SB-S/D) presents a promising solution to reducing parasitic resistance for device architectures such as fully depleted UTB, trigate, or FinFET. In this letter, a low-temperature process (<= 700 degrees C) with PtSi-based S/D is examined for the fabrication of n-type UTB and trigate FETs on SOI substrate (t(si) = 30 nm). Dopant segregation with As was used to achieve the n-type behavior at implantation doses of 1 (.) 10(15) and 5. 10(15) cm(-2). Similar results were found for UTB devices with both doses, but trigate devices with the larger dose exhibited higher on currents and smaller process variation than their lower dose counterparts.

Nyckelord

Dopant segregation (DS)

FinFET

platinum silicide PtSi

Schottky-barrier (SB)-MOSFET

trigate

YTTERBIUM SILICIDE

SOURCE/DRAIN

TECHNOLOGY

TECHNOLOGY

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)