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On the role of meta...
On the role of metastables in capacitively coupled oxygen discharges
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- Gudmundsson, Jon Tomas (författare)
- KTH,Rymd- och plasmafysik
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Lieberman, M. A. (författare)
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(creator_code:org_t)
- 2015-06-01
- 2015
- Engelska.
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Ingår i: Plasma sources science & technology. - : IOP Publishing. - 0963-0252 .- 1361-6595. ; 24:3
- Relaterad länk:
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https://urn.kb.se/re...
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visa fler...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- The roles of the metastable atoms O(D-1) and molecules O-2(a(1)Delta(g)) in a capacitively coupled rf driven oxygen discharge at 50 mTorr are explored using the one-dimensional object- oriented PIC/MCC code oopd1, which has one spatial dimension and three velocity components. The oxygen discharge model considers the species O2(X3 Sigma g-), O-2(a(1)Delta(g)) O(P-3), O(D-1), O-2(+), O+, O-, and electrons. The particle density profiles, the electron heating rate profile, the electron energy probability function and the ion energy distribution function at the grounded electrode are explored, including and/or excluding the metastables and secondary electron emission. We find that detachment by the metastable molecule O-2(a(1)Delta(g)) has a significant influence on the discharge properties such as the electronegativity, the effective electron temperature and the electron heating processes.
Ämnesord
- NATURVETENSKAP -- Kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences (hsv//eng)
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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