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Ion Energy and Angu...
Ion Energy and Angular Distributions in a Dual-frequency Capacitively Coupled Chlorine Discharge
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Huang, Shuo (författare)
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- Gudmundsson, Jon Tomas (författare)
- Shanghai Jiao Tong University; University of Iceland
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(creator_code:org_t)
- Institute of Electrical and Electronics Engineers (IEEE), 2014
- 2014
- Engelska.
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Ingår i: IEEE Transactions on Plasma Science. - : Institute of Electrical and Electronics Engineers (IEEE). - 0093-3813 .- 1939-9375. ; 42:10, s. 2854-2855
- Relaterad länk:
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https://urn.kb.se/re...
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visa fler...
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https://doi.org/10.1...
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visa färre...
Abstract
Ämnesord
Stäng
- Ion energy distributions (IEDs) and ion angular distributions (IADs) of Cl2 + and Cl+ ions in a dual-frequency capacitively coupled chlorine discharge are obtained through a particle-in-cell/Monte Carlo simulation. Since the ion transit time is less than the low-frequency period, the ions respond to the instantaneous electric field in the sheath region, which leads to bimodal IEDs for Cl2 + and Cl+ ions. When transiting the sheath, the Cl+ ions experience a more collisional sheath than the Cl2 + ions. The IADs of Cl2 + and Cl+ ions at the surface are almost anisotropic. However, a secondary peak is found in the IAD of Cl+ ions, which can be ascribed to dissociative ionization reactions.
Ämnesord
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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