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Target optimization...
Abstract
Ämnesord
Stäng
- We optimize the water-window x-ray flux and debris deposition for a liquid-jet laser plasma source by varying both the target diameter and the jet material. For two target liquids, methanol and ethanol, measurements of the lambda = 3.37 nm C vi x-ray flux and the debris deposition rates are presented as function of the jet diameter. It is shown that the effective carbon debris deposition is more than I order of magnitude smaller for methanol, while the x-ray flux is reduced only similar to40%. The reduction in carbon debris deposition may be explained by reactive ion etching by oxygen from the plasma. Thus, the methanol water-window source may be operated at a 5-10X higher flux without increasing the debris deposition. The optimization potentially allows a reduction of the exposure time of compact soft x-ray microscopy or other water-window applications based on such sources without increasing damage to sensitive x-ray optics.
Nyckelord
- x-ray generation
- droplet-target
- spectroscopy
- microscopy
- emission
- design
- films
- euv
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- art (ämneskategori)
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