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14.5% near-normal i...
14.5% near-normal incidence reflectance of Cr/Sc x-ray multilayer mirrors for the water window
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- Eriksson, Fredrik (författare)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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Johansson, G. A. (författare)
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- Hertz, Hans M. (författare)
- KTH,Fysik
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visa fler...
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Gullikson, E. M. (författare)
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Kreissig, U. (författare)
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- Birch, Jens (författare)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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visa färre...
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(creator_code:org_t)
- 2003
- 2003
- Engelska.
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Ingår i: Optics Letters. - 0146-9592 .- 1539-4794. ; 28:24, s. 2494-2496
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- Cr/Sc multilayer mirrors, synthesized by ion-assisted magnetron sputter deposition, are proved to have a high near-normal reflectivity of R = 14.5% at a grazing angle of 87.5degrees measured at the wavelength A = 3.11 nm, which is an improvement of more than 31% compared with previously published results. Elastic recoil detection analyses show that the mirrors contained as much as 15 at. % of N and traces of C and O. Soft x-ray reflectivity simulations reveal interface widths of sigma = 0.34 nm and an exceptionally small layer thickness drift of similar to1.6 X 10(-5) nm/multilayer period throughout the stack. Simulations show that a reflectivity of R = 25.6% is attainable if impurities and layer thickness drift can be eliminated. The abrupt interfaces are achieved with ion assistance with a low ion energy of 24 eV and high ion-to-metal flux ratios of 7.1 and 23.1 during Cr and Se sputter deposition, respectively. In addition, a near-normal incidence reflectivity of 5.5% for the C VI emission line (lambda = 3.374 nm) from a laser plasma source was verified.
Nyckelord
- optics
- reflectivity
- transmission
- performance
- microscopy
- radiation
- region
- range
- line
- TECHNOLOGY
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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