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Stabilization of li...
Stabilization of liquified-inert-gas jets for laser-plasma generation
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- Hansson, Björn (författare)
- KTH,Fysik
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- Berglund, Magnus (författare)
- KTH,Fysik
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- Hemberg, Oscar (författare)
- KTH,Fysik
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- Hertz, Hans M. (författare)
- KTH,Fysik
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(creator_code:org_t)
- AIP Publishing, 2004
- 2004
- Engelska.
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Ingår i: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 95:8, s. 4432-4437
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- We investigate the hydrodynamic properties of liquified-inert-gas jets in a vacuum with a special emphasis on their stability. Such jets have applications as targets for laser-plasma generation of soft-x-ray and extreme-ultraviolet (EUV) radiation. An important example is the liquid-xenon-jet laser-plasma source, one of the source candidates for EUV lithography. A simple hydrodynamic model in not sufficient to explain experimental observations of jet stability. Evaporation-induced cooling explains observed in-flight freezing of the jet and may be a key factor influencing jet stability. It is shown how the jet stability, and, thus, the stability of the laser-plasma x-ray and EUV emission, are improved by applying localized heating to the tip of the jet-generating nozzle.
Ämnesord
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
Nyckelord
- x-ray source
- liquid-xenon
- droplet-target
- euv lithography
- debris
- evaporation
- stability
- hydrogen
- surface
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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