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Liquid-jet laser-pl...
Liquid-jet laser-plasma extreme ultraviolet sources : from droplets to filaments
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- Hansson, B. A. M. (författare)
- KTH,Fysik
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- Hertz, Hans M. (författare)
- KTH,Fysik
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(creator_code:org_t)
- 2004-11-20
- 2004
- Engelska.
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Ingår i: Journal of Physics D. - : IOP Publishing. - 0022-3727 .- 1361-6463. ; 37:23, s. 3233-3243
- Relaterad länk:
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https://urn.kb.se/re...
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visa fler...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- The laser plasma is one of the major contenders as a high-power source for future high-volume-manufacturing extreme ultraviolet lithography systems. Such laser-plasma sources require a target system that allows high-repetition-rate operation with low debris and manageable thermal load at the required high laser power. In this paper, we review the development of the liquid-jet target laser plasmas, from droplets to filaments, with special emphasis on its applicability for high-power extreme ultraviolet generation. We focus on two target systems, the liquid-xenon-jet and the liquid-tin-jet.
Ämnesord
- NATURVETENSKAP -- Fysik -- Fusion, plasma och rymdfysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Fusion, Plasma and Space Physics (hsv//eng)
Nyckelord
- x-ray generation
- gas puff targets
- euv-lithography
- debris
- emission
- radiation
- hydrogen
- elements
- power
- tin
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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