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Small footprint kni...
Small footprint knife gate microvalves for large flow control
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- Braun, Stefan (författare)
- KTH,Mikrosystemteknik
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- Haasl, Sjoerd (författare)
- KTH,Mikrosystemteknik
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- Sadoon, Samir (författare)
- KTH,Mikrosystemteknik
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Ridgeway, A S (författare)
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- van der Wijngaart, Wouter (författare)
- KTH,Mikrosystemteknik
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- Stemme, Göran (författare)
- KTH,Mikrosystemteknik
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(creator_code:org_t)
- NEW YORK : IEEE conference proceedings, 2005
- 2005
- Engelska.
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Ingår i: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems conference (IEEE TRANSDUCERS 2005). - NEW YORK : IEEE conference proceedings. ; , s. 329-332
- Relaterad länk:
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http://ieeexplore.ie...
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https://kth.diva-por... (primary) (Raw object)
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- This paper introduces the first area-optimized micromachined knife gate microvalve. In comparison to recent microvalves the pressure-flow performance is increased using out-of-plane actuators and an out-of-plane orifice. Three different actuator-gate designs and their fabrication are described. The valve features integrated therinal silicon/aluminum bimorph actuators where the aluminum layer forins the resistive heater as well as the bimorph material. The characterization of the actuators and of the pressure-flow perfon-nance is presented. The valve allows a flow change of Delta Q=3.4 1/min at 100 kPa on an active chip area of only 2.3 x 3.7 mm(2).
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- microvalves
- micropneumatics
- microfluidics
- Electrical engineering, electronics and photonics
- Elektroteknik, elektronik och fotonik
Publikations- och innehållstyp
- ref (ämneskategori)
- kon (ämneskategori)