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Metal-Assisted Chem...
Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates
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- Akan, Rabia (författare)
- Stockholm University,KTH,Biomedicinsk fysik och röntgenfysik
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- Frisk, Thomas (författare)
- Stockholm University,KTH,Biomedicinsk fysik och röntgenfysik
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- Lundberg, Fabian (författare)
- Stockholm University,KTH,Biomedicinsk fysik och röntgenfysik
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- Ohlin, Hanna (författare)
- Stockholm University,KTH,Biomedicinsk fysik och röntgenfysik
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- Johansson, Ulf (författare)
- Lund University,Lunds universitet,MAX IV-laboratoriet,MAX IV Laboratory
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- Li, Kenan (författare)
- SLAC Natl Accelerator Lab, 2575 Sand Hill Rd, Menlo Pk, CA 94025 USA.,Stanford Linear Accelerator Center (SLAC)
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- Sakdinawat, Anne (författare)
- SLAC Natl Accelerator Lab, 2575 Sand Hill Rd, Menlo Pk, CA 94025 USA.,Stanford Linear Accelerator Center (SLAC)
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- Vogt, Ulrich (författare)
- Stockholm University,KTH,Biomedicinsk fysik och röntgenfysik
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(creator_code:org_t)
- 2020-03-13
- 2020
- Engelska.
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Ingår i: Micromachines. - : MDPI. - 2072-666X. ; 11:3
- Relaterad länk:
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https://doi.org/10.3...
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https://www.mdpi.com...
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http://dx.doi.org/10... (free)
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https://urn.kb.se/re...
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https://doi.org/10.3...
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https://lup.lub.lu.s...
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Abstract
Ämnesord
Stäng
- Zone plates are diffractive optics commonly used in X-ray microscopes. Here, we present a wet-chemical approach for fabricating high aspect ratio Pd/Si zone plate optics aimed at the hard X-ray regime. A Si zone plate mold is fabricated via metal-assisted chemical etching (MACE) and further metalized with Pd via electroless deposition (ELD). MACE results in vertical Si zones with high aspect ratios. The observed MACE rate with our zone plate design is 700 nm/min. The ELD metallization yields a Pd density of 10.7 g/cm3, a value slightly lower than the theoretical density of 12 g/cm3. Fabricated zone plates have a grid design, 1:1 line-to-space-ratio, 30 nm outermost zone width, and an aspect ratio of 30:1. At 9 keV X-ray energy, the zone plate device shows a first order diffraction efficiency of 1.9%, measured at the MAX IV NanoMAX beamline. With this work, the possibility is opened to fabricate X-ray zone plates with low-cost etching and metallization methods.
Ämnesord
- MEDICIN OCH HÄLSOVETENSKAP -- Klinisk medicin -- Radiologi och bildbehandling (hsv//swe)
- MEDICAL AND HEALTH SCIENCES -- Clinical Medicine -- Radiology, Nuclear Medicine and Medical Imaging (hsv//eng)
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
Nyckelord
- X-ray diffractive optics
- zone plate
- high aspect ratio nanostructures
- metal-assisted chemical etching
- electroless deposition
- Electroless deposition
- High aspect ratio nanostructures
- Metal-assisted chemical etching
- X-ray diffractive optics
- Zone plate
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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