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High efficiency non...
High efficiency nonuniform grating coupler by utilizing the lag effect in the dry etching process
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- Tang, Yongbo (författare)
- KTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP
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- Wang, Zhechao (författare)
- KTH,Zhejiang-KTH Joint Research Center of Photonics, JORCEP,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP
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- Westergren, Urban, 1960- (författare)
- KTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP
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visa fler...
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- Wosinski, Lech, 1951- (författare)
- KTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP
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(creator_code:org_t)
- Washington, D.C. Optical Society of America (OSA), 2010
- 2010
- Engelska.
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Ingår i: Optics InfoBase Conference Papers. - Washington, D.C. : Optical Society of America (OSA). - 9781557528841
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- Utilizing the lag effect in dry etching, a nonuniform silicon-on-insulator grating coupler is designed and fabricated. Over 80% (>-1dB) coupling efficiency is theoretically obtained and experimental coupling efficiency of 55% is achieved for TE polarization.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Dry etching
- Efficiency
- Optical fiber fabrication
- Optical fibers
- Silicon on insulator technology
- Coupling efficiency
- Dry etching process
- Grating couplers
- High-efficiency
- Lag effects
- Nonuniform gratings
- TE polarizations
- Optical fiber communication
- Electrical engineering, electronics and photonics
Publikations- och innehållstyp
- ref (ämneskategori)
- kon (ämneskategori)
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