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Biocompatible "clic...
Biocompatible "click" wafer bonding for microfluidic devices
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- Saharil, Farizah (författare)
- KTH,Mikrosystemteknik
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- Carlborg, Carl Fredrik (författare)
- KTH,Mikrosystemteknik
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- Haraldsson, Tommy (författare)
- KTH,Mikrosystemteknik
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- van der Wijngaart, Wouter (författare)
- KTH,Mikrosystemteknik
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(creator_code:org_t)
- RSC Publishing, 2012
- 2012
- Engelska.
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Ingår i: Lab on a Chip. - : RSC Publishing. - 1473-0197 .- 1473-0189. ; 12:17, s. 3032-3035
- Relaterad länk:
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http://pubs.rsc.org/...
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https://kth.diva-por... (primary) (Raw object)
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http://kth.diva-port...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- We introduce a novel dry wafer bonding concept designed for permanent attachment of micromolded polymer structures to surface functionalized silicon substrates. The method, designed for simultaneous fabrication of many lab-on-chip devices, utilizes a chemically reactive polymer microfluidic structure, which rapidly bonds to a functionalized substrate via "click" chemistry reactions. The microfluidic structure consists of an off-stoichiometry thiol-ene (OSTE) polymer with a very high density of surface bound thiol groups and the substrate is a silicon wafer that has been functionalized with common bio-linker molecules. We demonstrate here void free, and low temperature (<37 degrees C) bonding of a batch of OSTE microfluidic layers to a silane functionalized silicon wafer.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Adhesive
- wafer bonding
- heterogeneous integration
- OSTE
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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