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Buried tantalate-ni...
Buried tantalate-niobate microwave varactors
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- Bonetti, Stefano (författare)
- KTH,Materialfysik
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- Kim, Jang-Yong (författare)
- KTH,Mikroelektronik och tillämpad fysik, MAP
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- Khartsev, Sergiy (författare)
- KTH,Mikroelektronik och tillämpad fysik, MAP
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- Grishin, Alexander (författare)
- KTH,Mikroelektronik och tillämpad fysik, MAP
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(creator_code:org_t)
- 2007
- 2007
- Engelska.
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Ingår i: 2006 15TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS. - 9781424413317 ; , s. 347-350
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- We present characteristics of microwave variable capacitors (varactors) buried in 2.5 mu m thick AgTa0.5Nb0.5O3 (ATN) film pulsed laser deposited on sapphire single crystal. 2 gm gap interdigital capacitors (IDC) were fabricated by photolithographic, dry etching and lift-off processes. For comparison, similar IDCs were also defined on top of ATN film. Capacitance and loss tangent have been determined using a modified de-embedding technique in the microwave range 25 MHz - 40 GHz. Buried structures show higher values of capacitance and tunability, keeping the same level of losses compared to standard topped devices and resulting in an increased K-factor = tunability/tan delta. Experimental results are explained within equivalent circuit model. Besides the increased performance, the new design avoids the need of a successive planarization step, which could be required in an integration process.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Silver-tantalate-niobate
- voltage tunability
- buried interdigital capacitors
- Electrical engineering, electronics and photonics
- Elektroteknik, elektronik och fotonik
Publikations- och innehållstyp
- ref (ämneskategori)
- kon (ämneskategori)
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