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Site-controlled gro...
Site-controlled growth of GaN nanorod arrays by magnetron sputter epitaxy
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- Serban, Elena Alexandra, 1988- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Palisaitis, Justinas, 1983- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Persson, Per Ola Åke, 1971- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Hultman, Lars, Professor, 1960- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Birch, Jens, 1960- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Hsiao, Ching-Lien, 1975- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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(creator_code:org_t)
- Elsevier, 2018
- 2018
- Engelska.
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Ingår i: Thin Solid Films. - : Elsevier. - 0040-6090 .- 1879-2731. ; 660, s. 950-955
- Relaterad länk:
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https://doi.org/10.1...
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https://liu.diva-por... (primary) (Raw object)
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https://liu.diva-por...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Catalyst-free GaN nanorod regular arrays have been realized by reactive magnetron sputter epitaxy. Two nanolithographic methods, nanosphere lithography (NSL) and focused ion beam lithography (FIBL), were applied to pattern Si substrates with TiNx masks. The growth temperature was optimized for achieving selectivity and well-faceted nanorods grown onto the NSL-patterned substrates. With increasing temperature from 875 to 985 °C, we observe different growth behaviors and associate them with selective insensitive, diffusion-dominated, and desorption-dominated zones. To further achieve site-specific and diameter control, these growth parameters were transferred onto FIBL-patterned substrates. Further investigation into the FIBL process through tailoring of milling current and time in combination with varying nanorod growth temperature, suggests that minimization of mask and substrate damage is the key to attain uniform, well-defined, single, and straight nanorods. Destruction of the mask results in selective area growth failure, while damage of the substrate surface promotes inclined nanorods grown into the openings, owning to random oriented nucleation.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- Gallium nitride
- Magnetron sputter epitaxy
- Selective-area growth
- Nanorods
- Lithography
- Focused ion beam
- Nanosphere
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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