Sökning: onr:"swepub:oai:DiVA.org:liu-170703" >
In situ nanoindenta...
In situ nanoindentation measurements of arc-evaporated Cr0.49Al0.51N, Al0.66Ti0.34N, and Al0.65Ti0.33Y0.02N films up to 800 degrees C
-
- Wu, Zhengtao (författare)
- Guangdong Univ Technol, Peoples R China
-
- Wang, Qimin (författare)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska fakulteten,Guangdong Univ Technol, Peoples R China
-
- Kim, Kwang Ho (författare)
- Pusan Natl Univ, South Korea
-
(creator_code:org_t)
- A V S AMER INST PHYSICS, 2020
- 2020
- Engelska.
-
Ingår i: Journal of Vacuum Science and Technology B. - : A V S AMER INST PHYSICS. - 2166-2746 .- 2166-2754. ; 38:2
- Relaterad länk:
-
https://urn.kb.se/re...
-
visa fler...
-
https://doi.org/10.1...
-
visa färre...
Abstract
Ämnesord
Stäng
- In this study, the in situ hardness and elastic modulus measurements of arc-evaporated Cr0.49Al0.51N, Al0.66Ti0.34N, and Al0.65Ti0.33Y0.02N films are investigated using a high-temperature nanoindentation tester. It is found that the hardness of Cr0.49Al0.51N initially increases from 30.2 +/- 2.3GPa at room temperature (RT) and reaches a maximum of 33.2 +/- 2.4GPa at 600 degrees C before decreasing to 27.9 +/- 2.1GPa at 800 degrees C. However, the results for elastic modulus versus temperature follow a degraded trend, with 405 +/- 23GPa for RT, decreasing to 280 +/- 18GPa at 800 degrees C. Increases in the hardness and the elastic modulus can be achieved for both Al0.66Ti0.34N and Al0.65Ti0.33Y0.02N films as their temperatures increase. The addition of Y effectively promotes the hardness and the elastic modulus of Al0.66Ti0.34N at RT-300 degrees C. However, both hardness and elastic modulus change slightly as Y is incorporated at 300-800 degrees C.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Kemiteknik -- Polymerteknologi (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Chemical Engineering -- Polymer Technologies (hsv//eng)
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
Hitta via bibliotek
Till lärosätets databas