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In situ nanoindenta...
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Wu, ZhengtaoGuangdong Univ Technol, Peoples R China
(författare)
In situ nanoindentation measurements of arc-evaporated Cr0.49Al0.51N, Al0.66Ti0.34N, and Al0.65Ti0.33Y0.02N films up to 800 degrees C
- Artikel/kapitelEngelska2020
Förlag, utgivningsår, omfång ...
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A V S AMER INST PHYSICS,2020
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printrdacarrier
Nummerbeteckningar
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LIBRIS-ID:oai:DiVA.org:liu-170703
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https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-170703URI
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https://doi.org/10.1116/1.5138723DOI
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Språk:engelska
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Sammanfattning på:engelska
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Ämneskategori:ref swepub-contenttype
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Ämneskategori:art swepub-publicationtype
Anmärkningar
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Funding Agencies|National Natural Science Foundation of China (NNSFC)National Natural Science Foundation of China (NSFC) [51901048, 51875109]; Natural Science Foundation of Guangdong ProvinceNational Natural Science Foundation of Guangdong Province [2018A030310546, 2019A1515012234]; Global Frontier Program through the Global Frontier Hybrid Interface Materials of the National Research Foundation of Korea [2013M3A6B1078873]
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In this study, the in situ hardness and elastic modulus measurements of arc-evaporated Cr0.49Al0.51N, Al0.66Ti0.34N, and Al0.65Ti0.33Y0.02N films are investigated using a high-temperature nanoindentation tester. It is found that the hardness of Cr0.49Al0.51N initially increases from 30.2 +/- 2.3GPa at room temperature (RT) and reaches a maximum of 33.2 +/- 2.4GPa at 600 degrees C before decreasing to 27.9 +/- 2.1GPa at 800 degrees C. However, the results for elastic modulus versus temperature follow a degraded trend, with 405 +/- 23GPa for RT, decreasing to 280 +/- 18GPa at 800 degrees C. Increases in the hardness and the elastic modulus can be achieved for both Al0.66Ti0.34N and Al0.65Ti0.33Y0.02N films as their temperatures increase. The addition of Y effectively promotes the hardness and the elastic modulus of Al0.66Ti0.34N at RT-300 degrees C. However, both hardness and elastic modulus change slightly as Y is incorporated at 300-800 degrees C.
Ämnesord och genrebeteckningar
Biuppslag (personer, institutioner, konferenser, titlar ...)
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Wang, QiminLinköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska fakulteten,Guangdong Univ Technol, Peoples R China(Swepub:liu)n/a
(författare)
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Kim, Kwang HoPusan Natl Univ, South Korea
(författare)
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Guangdong Univ Technol, Peoples R ChinaInstitutionen för fysik, kemi och biologi
(creator_code:org_t)
Sammanhörande titlar
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Ingår i:Journal of Vacuum Science and Technology B: A V S AMER INST PHYSICS38:22166-27462166-2754
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