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Study on different ...
Study on different isolation technology on the performance of blue micro-LEDs array applications
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- Lin, Shao-Hua (författare)
- Natl Yang Ming Chiao Tung Univ, Taiwan
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- Lo, Yu-Yun (författare)
- Natl Yang Ming Chiao Tung Univ, Taiwan
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- Hsu, Yu-Hsuan (författare)
- Natl Yang Ming Chiao Tung Univ, Taiwan
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- Lin, Chien-Chung (författare)
- Natl Taiwan Univ, Taiwan
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- Zan, Hsiao-Wen (författare)
- Natl Yang Ming Chiao Tung Univ, Taiwan
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- Lin, Yi-Hsin (författare)
- Natl Yang Ming Chiao Tung Univ, Taiwan
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- Wuu, Dong-Sing (författare)
- Natl Chi Nan Univ, Taiwan
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- Hsiao, Ching-Lien (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Horng, Ray-Hua (författare)
- Natl Yang Ming Chiao Tung Univ, Taiwan
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(creator_code:org_t)
- SPRINGER, 2024
- 2024
- Engelska.
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Ingår i: DISCOVER NANO. - : SPRINGER. - 2731-9229. ; 19:1
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- In this study, a 3 x 3 blue micro-LED array with a pixel size of 10 x 10 mu m2 and a pitch of 15 mu m was fabricated on an epilayer grown on a sapphire substrate using metalorganic chemical vapor deposition technology. The fabrication process involved photolithography, wet and dry etching, E-beam evaporation, and ion implantation technology. Arsenic multi-energy implantation was utilized to replace the mesa etching for electrical isolation, where the implantation depth increased with the average energy. Different ion depth profiles had varying effects on electrical properties, such as forward current and leakage currents, potentially causing damage to the n-GaN layer and increasing the series resistance of the LEDs. As the implantation depth increased, the light output power and peak external quantum efficiency of the LEDs also increased, improving from 5.33 to 9.82%. However, the efficiency droop also increased from 46.3 to 48.6%.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- Micro-LED; Pixel size; Ion implantation technology; Electrical isolation
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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