Sökning: onr:"swepub:oai:DiVA.org:liu-28813" >
Synthesis of carbon...
Synthesis of carbon nitride thin films by low-energy ion beam assisted evaporation : On the mechanisms for fullerene-like microstructure formation
-
- Gago, R. (författare)
- Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden
-
- Neidhardt, Jörg, 1976- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
-
- Vinnichenko, M. (författare)
- Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden
-
visa fler...
-
- Kreissig, U. (författare)
- Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden
-
- Czigany, Zsolt (författare)
- Hungarian Academy of Sciences, Budapest,
-
- Kolitsch, A. (författare)
- Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden
-
- Hultman, Lars, 1960- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
-
- Möller, W. (författare)
- Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden
-
visa färre...
-
(creator_code:org_t)
- Elsevier BV, 2005
- 2005
- Engelska.
-
Ingår i: Thin Solid Films. - : Elsevier BV. - 0040-6090 .- 1879-2731. ; 483:1-2, s. 89-94
- Relaterad länk:
-
https://urn.kb.se/re...
-
visa fler...
-
https://doi.org/10.1...
-
visa färre...
Abstract
Ämnesord
Stäng
- Carbon nitride (CNx) thin films were grown at different substrate temperatures by low-energy (<100 eV) ion beam assistance deposition (LE-IBAD) in order to discern possible formation mechanisms of a fullerene-like (FL) microstructure. The samples are compared to those of well-structured FL-CNx films synthesized by reactive magnetron sputtering (MS). The comparison yields similar trends for both techniques, such as limitation of the nitrogen content at 20–25 at.%, dominance of sp2 hybrids, as well as thermally activated chemical desorption of CxNy species from the substrate during growth. However, CNx films produced by LE-IBAD are amorphous. The lack of FL structural features correlates with a lower degree of sp2 clustering, attributed to the promotion of nitrile groups. Therefore, low-energy ion bombardment is shown not to be a sufficient condition for the growth of FL-CNx. This result reinforces the eventual relevance of pre-formed CxNy species at the sputtering target in MS for the introduction and/or evolution of FL arrangements.
Nyckelord
- NATURAL SCIENCES
- NATURVETENSKAP
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
Hitta via bibliotek
Till lärosätets databas
- Av författaren/redakt...
-
Gago, R.
-
Neidhardt, Jörg, ...
-
Vinnichenko, M.
-
Kreissig, U.
-
Czigany, Zsolt
-
Kolitsch, A.
-
visa fler...
-
Hultman, Lars, 1 ...
-
Möller, W.
-
visa färre...
- Artiklar i publikationen
-
Thin Solid Films
- Av lärosätet
-
Linköpings universitet