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Grazing incident as...
Grazing incident asymmetric X-ray diffraction of beta-FeSi2 layers, produced by ion beam synthesis
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Atanassov, A (författare)
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Baleva, M (författare)
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- Darakchieva, Vanya (författare)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
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Goranova, E (författare)
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(creator_code:org_t)
- Elsevier BV, 2004
- 2004
- Engelska.
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Ingår i: Vacuum. - : Elsevier BV. - 0042-207X .- 1879-2715. ; 76:02-Mar, s. 277-280
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
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- The crystal structure of beta-FeSi2 phase, prepared by ion beam synthesis (IBS) method, followed by rapid thermal annealing (RTA) is investigated by grazing incident asymmetric X-ray diffraction (GIAXRD). The X-ray spectra, obtained at different grazing angles, indicated that the beta-FeSi2 phase is formed in the whole implantation range. From the comparison of the reflections intensities ratios, it is found that in the metal-deficient regions, where the beta-FeSi2 phase is present in the form of precipitates, the crystallites orientation is influenced by the one of the silicon substrates, while the orientation in the metal-rich region is different and depends on the annealing temperature. (C) 2004 Elsevier Ltd. All rights reserved.
Nyckelord
- beta-FeSi2
- layers
- ion beam synthesis
- crystal structure
- TECHNOLOGY
- TEKNIKVETENSKAP
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- art (ämneskategori)
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Vacuum
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