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Influence of trench...
Influence of trenching effect on the characteristics of buried-gate SiC junction field-effect transistors
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- Koo, SM (författare)
- Royal Inst Technol, KTH, Dept Microelect & Informat Technol, SE-16440 Kista, Sweden Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden
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Lee, Sun Kyun (författare)
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- Zetterling, CM (författare)
- Royal Inst Technol, KTH, Dept Microelect & Informat Technol, SE-16440 Kista, Sweden Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden
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visa fler...
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- Ostling, M (författare)
- Royal Inst Technol, KTH, Dept Microelect & Informat Technol, SE-16440 Kista, Sweden Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden
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- Forsberg, Urban (författare)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
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- Janzén, Erik (författare)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
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visa färre...
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(creator_code:org_t)
- 2002
- 2002
- Engelska.
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Ingår i: Materials Science Forum, Vols. 389-393. ; , s. 1235-1238
- Relaterad länk:
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https://urn.kb.se/re...
Abstract
Ämnesord
Stäng
- Two different structures of junction field-effect transistors in 4H-SiC, with and without trenching effect in the channel region, have been fabricated and characterized. The devices formed with metal mask show a trenching profile (>similar to0.2 mum) after dry etch in the channel groove region and exhibited static induction transistor (SIT)-like characteristics in the sub-threshold region of I-V curves as the channel thickness decreases. The devices without trenching effect have been processed by using a wet-etched oxide mask resulting in a sloped dry-etch profile (theta=similar to30degrees) in the channel, and consequently showed well-saturated drain characteristics for all the channel thicknesses. The conduction mechanisms in these JFETs are examined by the potential profiles from two dimensional numerical simulations.
Nyckelord
- dry etching
- JFETs
- SiC
- trenching effect
- TECHNOLOGY
- TEKNIKVETENSKAP
Publikations- och innehållstyp
- ref (ämneskategori)
- kon (ämneskategori)