Sökning: onr:"swepub:oai:DiVA.org:liu-49413" >
Raman spectra of Ti...
Raman spectra of TiN/AlN superlattices
-
- Bernard, M (författare)
- CNRS, LEPES, F-38042 Grenoble 9, France Fac Sci & Tech St Jerome, MATOP, CNRS, F-13397 Marseille, France Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden
-
- Deneuville, A (författare)
- CNRS, LEPES, F-38042 Grenoble 9, France Fac Sci & Tech St Jerome, MATOP, CNRS, F-13397 Marseille, France Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden
-
- Thomas, O (författare)
- CNRS, LEPES, F-38042 Grenoble 9, France Fac Sci & Tech St Jerome, MATOP, CNRS, F-13397 Marseille, France Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden
-
visa fler...
-
- Gergaud, P (författare)
- CNRS, LEPES, F-38042 Grenoble 9, France Fac Sci & Tech St Jerome, MATOP, CNRS, F-13397 Marseille, France Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden
-
Sandstrom, P (författare)
-
- Birch, Jens (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
-
visa färre...
-
(creator_code:org_t)
- 2000
- 2000
- Engelska.
-
Ingår i: Thin Solid Films. - 0040-6090 .- 1879-2731. ; 380:1-2, s. 252-255
- Relaterad länk:
-
https://urn.kb.se/re...
Abstract
Ämnesord
Stäng
- TiN (4.5 nm)/AIN (3, 6, 22 nm) superlattices deposited by DC magnetron sputtering on MgO(001) at a temperature of 850 degreesC exhibit Raman signals. They indicate N and Ti vacancies (as in thick TiN) in TiN1-x layers (x = 3 +/- 2%). x is higher for the sample with 3-nm thick AIN layers, which is ascribed to N diffusion from AIN (standing close to the TiN interfaces) to TiN. In comparison to Raman peaks of thick ALN, there are split signals of wurzite ALN phase, and a signal from another phase, which might be defective rocksalt AIN standing close to the TiN interfaces. The Raman signals clearly show interactions between ALN and TiN layers. (C) 2000 Elsevier Science B.V. All rights reserved.
Nyckelord
- SC/metal superlattices
- nanometric layers
- Raman
- vacancies
- TiN
- AlN
- NATURAL SCIENCES
- NATURVETENSKAP
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
Hitta via bibliotek
Till lärosätets databas