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Studying 3C-SiC epi...
Studying 3C-SiC epilayers grown on the (0001)C face of 6H-SiC substrates
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- Lebedev, A.A. (författare)
- Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russian Federation
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- Zelenin, V.V. (författare)
- Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russian Federation
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- Abramov, P.L. (författare)
- Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russian Federation
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- Lebedev, S.P. (författare)
- Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russian Federation
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- Smirnov, A.N. (författare)
- Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russian Federation
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- Sorokin, L.M. (författare)
- Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russian Federation
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- Shcheglov, M.P. (författare)
- Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russian Federation
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- Yakimova, Rositsa (författare)
- Linköpings universitet,Nanostrukturerade material,Tekniska högskolan
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Ioffe Physicotechnical Institute, Russian Academy of Sciences, St Petersburg, 194021, Russian Federation Nanostrukturerade material (creator_code:org_t)
- 2007
- 2007
- Engelska.
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Ingår i: Technical physics letters. - 1063-7850 .- 1090-6533. ; 33:6, s. 524-526
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Epitaxial 3C-SiC films grown on the (0001)C face of 6H-SiC substrates by sublimation epitaxy in vacuum have been studied. The results of x-ray diffraction measurements show evidence of a rather high structural perfection of silicon carbide epilayers. The Raman spectroscopy data confirm that the 3C-SiC layer grows immediately on the 6H-SiC substrate without any transition layers. It is concluded that the structures under consideration are well suited for the investigation of a two-dimensional electron gas at the 3C-SiC/6C-SiC heterojunction. © Nauka/Interperiodica 2007.
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- NATURAL SCIENCES
- NATURVETENSKAP
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