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Metastable defects ...
Metastable defects in low-energy electron irradiated n-type 4H-SiC
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- Beyer, Franziska (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- Hemmingsson, Carl (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- Pedersen, Henrik (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- Henry, Anne (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- Isoya, Junichi (författare)
- University of Tsukuba
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- Morishita, Norio (författare)
- Japan Atomic Energy Agency
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- Ohshima, Takeshi (författare)
- Japan Atomic Energy Agency
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- Janzén, Erik (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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(creator_code:org_t)
- Trans Tech Publications, 2010
- 2010
- Engelska.
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Ingår i: Materials Science Forum, Vols. 645-648. - : Trans Tech Publications. ; , s. 435-438
- Relaterad länk:
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https://liu.diva-por... (primary) (Raw object)
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https://urn.kb.se/re...
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https://doi.org/10.4...
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Abstract
Ämnesord
Stäng
- After low-energy electron irradiation of epitaxial n-type 4H-SiC, the DUES peak amplitudes. of the defects Z(1/2) and EH6/7, which were already observed in as-grown layers, increased and the commonly found peaks EH1 and EH3 appeared. The bistable M-center, previously seen in high-energy proton implanted 4H-SiC, was detected. New bistable defects, the EB-centers, evolved after annealing out of the M-center, and EF3. The reconfiguration energies for one of the two EB-centers were determined to be about 0.96 eV for both transitions: from configuration I to II and from configuration II to I. Since low-energy electron irradiation (less than220 keV) affects mainly the carbon atom in SiC, both the M- and EB-centers are likely to be carbon related defects.
Nyckelord
- metastable defects; bistability; electron irradiation; DLTS
- TECHNOLOGY
- TEKNIKVETENSKAP
Publikations- och innehållstyp
- ref (ämneskategori)
- kon (ämneskategori)