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Improved Ni ohmic c...
Improved Ni ohmic contact on n-type 4H-SiC
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- Hallin, Christer (författare)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan
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- Yakimova, Rositsa (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- Pecz, B. (författare)
- Research Institute for Technical Physics, Budapest
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- Kakanakova-Georgieva, Anelia, 1970- (författare)
- Sofia University
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- Marinova, Ts. (författare)
- Bulgarian Academy of Sciences, Sofia
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- Kassamakova, L. (författare)
- Bulgarian Academy of Sciences, Plovdiv
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- Kakanakov, R. (författare)
- Bulgarian Academy of Sciences, Plovdiv
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- Janzén, Erik (författare)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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(creator_code:org_t)
- Springer Science and Business Media LLC, 1997
- 1997
- Engelska.
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Ingår i: Journal of Electronic Materials. - : Springer Science and Business Media LLC. - 0361-5235 .- 1543-186X. ; 26:3, s. 119-122
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- This paper presents the structural, chemical and electronic properties of Al/Ni/ Al-layers evaporated on 4H silicon carbide and then annealed at 1000°C for 5 min. The structure was investigated before and after annealing by transmission electron spectroscopy from cross-sectional specimens. With x-ray photoelectron spectroscopy, both element distribution and bonding energies were followed during sputtering through the alloyed metal-semiconductor contact. Voids are found in both annealed Ni/4H-SiC and Al/Ni/Al/4H-SiC contact layers, though closer to the metal-semiconductor interface in the former case. The first aluminum-layer is believed to prevent voids to be formed at the interface and also to reduce the oxide on the semiconductor surface. The contact was found to be ohmic with a specific contact resistance ρc - 1.8 × 10−5 Ωcm2 which is more than three times lower ρc than for the ordinary Ni/4H-SiC contact prepared in the same way.
Nyckelord
- Al/Ni/Al/4H-SiC - transmission electron microscopy - x-ray photoelectron spectroscopy
- NATURAL SCIENCES
- NATURVETENSKAP
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