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Deposition and Phas...
Deposition and Phase Transformations of Ternary Al-Cr-O Thin Films
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- Khatibi, Ali, 1982- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Hultman, Lars, Professor (preses)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Eklund, Per, Dr. (preses)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Andersson, Jon, Dr. (opponent)
- SECO Tools AB, Fagersta
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(creator_code:org_t)
- ISBN 9789173932103
- Linköping : Linköping University Electronic Press, 2011
- Engelska 29 s.
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Serie: Linköping Studies in Science and Technology. Thesis, 0280-7971 ; 1474
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Abstract
Ämnesord
Stäng
- This thesis concerns the ternary Al-Cr-O system. (Al1-xCrx)2O3 solid solution thin films with 0.62 gas mixture. As-deposited and annealed (Al1-xCrx)2O3 thin films were analyzed by x-ray diffraction, elastic recoil detection analysis, scanning electron microscopy, transmission electron microscopy, and nanoindentation. (Al1-xCrx)2O3 showed to have face centered cubic structure with lattice parameter of 4.04 Å, which is in contrast to the typical corundum structure reported for these films. The as-deposited films exhibited hardness of ~ 26 GPa and elastic modulus of 220-235 GPa. Phase transformation from cubic to corundum (Al0.32Cr0.68)2O3 starts at 925 °C. Annealing at 1000 °C resulted in complete phase transformation, while no precipitates of alumina and chromia were observed. Studies on kinetics of phase transformation showed a two-step thermally activated process; phase transformation and grain growth with the apparent activation energies 213±162 and 945±27 kJ/mol, respectively.
Ämnesord
- NATURVETENSKAP -- Fysik -- Annan fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Other Physics Topics (hsv//eng)
Nyckelord
- Thin Films
- Hard Coatings
- Mathematical physics
- Matematisk fysik
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