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Activation energy o...
Activation energy of fcc-corundum phase transformation in (Al1-xCrx)2O3 Thin Films
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- Khatibi, Ali, 1982- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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(creator_code:org_t)
- 2011
- 2011
- Engelska.
- Relaterad länk:
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https://urn.kb.se/re...
Abstract
Ämnesord
Stäng
- Face centered cubic (Al1-xCrx)2O3 solid solution films, with x in the range 0.602 discharge at a substrate temperature of 500 °C. The films have a strong <100> preferred orientation. The unit cell parameter is 4.04 Å determined by x-ray diffraction and high resolution transmission electron microscopy techniques. The (Al1-xCrx)2O3 films are suggested to have a non-stoichiometric NaCl structure with 33% vacancy occupancy on Al/Cr sites. Nanoindentation shows that the films exhibit hardness values up to 26 GPa and reduced modulus of 220-235 GPa. In the present work, in-situ annealing studies were performed on as-deposited samples for a series of temperatures up to 1000 °C and annealing time of 8 h. The fcc structure remains intact up to 700 °C. A gradual phase transformation from fcc to corundum at 1000 °C is observed, where annealing for 1-3 h yields a partial transformation and annealing for > 4 h results in complete transformation to a-(Al1-xCrx)2O3. There is no indication of any phase separation into a-Cr2O3 and Al2O3.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Bearbetnings-, yt- och fogningsteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Manufacturing, Surface and Joining Technology (hsv//eng)
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
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